公开(公告)号：US07105133B2

公开(公告)日：2006-09-12

申请号：US10253023

申请日：2002-09-24

申请人： Dong-Hyun Kim ,  Do-Hyun Cho ,  Woo-Dong Sung ,  Jin-Suk Kim ,  Won-Suk Choi

发明人： Dong-Hyun Kim ,  Do-Hyun Cho ,  Woo-Dong Sung ,  Jin-Suk Kim ,  Won-Suk Choi

IPC分类号： B01L3/02 ,  B01L11/00 ,  G01N21/00 ,  G01N15/00

CPC分类号： G01N35/10 ,  G01N1/16 ,  G01N1/18 ,  Y10T436/11 ,  Y10T436/111666 ,  Y10T436/119163 ,  Y10T436/2575

摘要： A fluid sampling apparatus and associated fluid analyzer sample process fluids used in semiconductor manufacturing at a plurality of measurement points. The fluid sampling apparatus includes a first nozzle assembly having a plurality of outlet nozzles. The plurality of outlet nozzles are connected to lines supplying the process fluids. A second nozzle assembly is installed above the first nozzle assembly and includes an inlet nozzle connected to an apparatus for measuring a contamination level of the process fluids. A motor is connected to the second nozzle assembly to align a selected outlet nozzle with the inlet nozzle. A pneumatic cylinder is coupled to the first nozzle assembly to connect the selected outlet nozzle with the inlet nozzle. In this manner, it is possible to measure the contamination level of process fluids supplied at a plurality of measurement points by using a single measuring apparatus.

公开(公告)号：US07118473B2

公开(公告)日：2006-10-10

申请号：US10804972

申请日：2004-03-19

申请人： Woo-Dong Sung ,  Dong-Hyun Kim

发明人： Woo-Dong Sung ,  Dong-Hyun Kim

IPC分类号： F24F7/00

CPC分类号： F24F3/161 ,  F24F13/10 ,  F24F2110/40

摘要： An air velocity control unit includes first bars fixed using a frame. Second bars are disposed below the first bars. The second bars are alternatively arranged between the first bars. The second bars are connected with each other. The unit further includes a control member for moving the second bars upwardly and downwardly to control the air velocity. A connecting member connects the second bars to the control member. Clean air flows into a clean room by a controllable velocity in accordance with the upward and downward movement of the second bars.

摘要翻译： 空气速度控制单元包括使用框架固定的第一杆。 第二条杆设置在第一条杆的下方。 第二条杆可选地布置在第一杆之间。 第二个条彼此连接。 该单元还包括用于向上和向下移动第二杆以控制空气速度的控制构件。 连接构件将第二杆连接到控制构件。 清洁空气根据第二杆的向上和向下运动以可控的速度流入洁净室。