公开(公告)号：US07189638B2

公开(公告)日：2007-03-13

申请号：US10739578

申请日：2003-12-19

申请人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park

发明人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park

IPC分类号： H01L21/4763

CPC分类号： H01L21/76879

摘要： A method for manufacturing a metal structure using a trench includes etching a semiconductor substrate to form a trench, depositing a seed layer over the semiconductor substrate including in the trench, stacking an insulating layer over the seed layer, removing a portion of the insulating layer to expose a portion of the seed layer at a bottom of the trench, filling the trench with a metal material, and removing the seed layer and the insulating layer on the semiconductor substrate. As a result, a subsequent process in forming a multi-layered structure may be easily carried out, thereby simplifying a manufacturing process.

摘要翻译： 使用沟槽制造金属结构的方法包括蚀刻半导体衬底以形成沟槽，在包括沟槽中的半导体衬底上沉积晶种层，在种子层上堆叠绝缘层，去除绝缘层的一部分 在沟槽的底部露出种子层的一部分，用金属材料填充沟槽，以及去除半导体衬底上的晶种层和绝缘层。 结果，可以容易地进行形成多层结构的后续处理，从而简化制造过程。

公开(公告)号：US07071688B2

公开(公告)日：2006-07-04

申请号：US10773456

申请日：2004-02-09

申请人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

发明人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

IPC分类号： G01R33/02

CPC分类号： G01R33/02

摘要： Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

公开(公告)号：US07382123B2

公开(公告)日：2008-06-03

申请号：US10859591

申请日：2004-06-03

申请人： Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Dong-sik Shim

发明人： Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Dong-sik Shim

IPC分类号： G01R33/04 ,  G01R33/02

CPC分类号： G01R33/05

摘要： A micro-machining method of manufacturing a micro fluxgate sensor manufactured having an amorphous magnetic core includes forming lower coils of an excitation coil and a magnetic field detecting coil on a wafer, depositing a first insulating layer on the lower coils and forming an amorphous magnetic core, depositing a second insulating layer on the amorphous magnetic core and forming upper coils connected to the lower coils to complete the excitation coil and the magnetic field detecting coil, and covering the excitation coil and the magnetic field detecting coil with a protective film, and etching the protective film to expose a portion of the excitation coil and magnetic field detecting coil, thereby forming a pad.

摘要翻译： 制造具有非晶磁芯的微通道门传感器的微加工方法包括在晶片上形成励磁线圈和磁场检测线圈的下线圈，在第一下层线圈上沉积第一绝缘层，并形成无定形磁芯 在非晶磁芯上沉积第二绝缘层，形成连接到下线圈的上部线圈，以完成励磁线圈和磁场检测线圈，并用保护膜覆盖励磁线圈和磁场检测线圈，以及蚀刻 所述保护膜暴露所述激励线圈和磁场检测线圈的一部分，从而形成焊盘。

公开(公告)号：US20050024050A1

公开(公告)日：2005-02-03

申请号：US10859591

申请日：2004-06-03

申请人： Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Dong-sik Shim

发明人： Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Dong-sik Shim

IPC分类号： G01R29/08 ,  G01R33/04 ,  G01R33/05 ,  H01F10/13 ,  H01F41/34 ,  G11B5/147

CPC分类号： G01R33/05

摘要： A micro-machining method of manufacturing a micro fluxgate sensor manufactured having an amorphous magnetic core includes forming lower coils of an excitation coil and a magnetic field detecting coil on a wafer, depositing a first insulating layer on the lower coils and forming an amorphous magnetic core, depositing a second insulating layer on the amorphous magnetic core and forming upper coils connected to the lower coils to complete the excitation coil and the magnetic field detecting coil, and covering the excitation coil and the magnetic field detecting coil with a protective film, and etching the protective film to expose a portion of the excitation coil and magnetic field detecting coil, thereby forming a pad.

摘要翻译： 制造具有非晶磁芯的微通道门传感器的微加工方法包括在晶片上形成励磁线圈和磁场检测线圈的下线圈，在第一下层线圈上沉积第一绝缘层，并形成无定形磁芯 在非晶磁芯上沉积第二绝缘层，形成连接到下线圈的上部线圈，以完成励磁线圈和磁场检测线圈，并用保护膜覆盖励磁线圈和磁场检测线圈，以及蚀刻 所述保护膜暴露所述激励线圈和磁场检测线圈的一部分，从而形成焊盘。

公开(公告)号：US20050006713A1

公开(公告)日：2005-01-13

申请号：US10784479

申请日：2004-02-23

申请人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Jun-sik Hwang

发明人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Jun-sik Hwang

IPC分类号： G01R33/02 ,  G01R33/028 ,  G01R33/04 ,  G01R33/05 ,  H01F17/00 ,  H01F41/04 ,  H01F41/14 ,  H01F41/34 ,  H01L43/00 ,  G11B5/127

CPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01F17/0006 ,  H01F41/046

摘要： Disclosed is a method for manufacturing a magnetic field detecting element, capable of simplifying the manufacturing process and providing a thin-type magnetic field detecting element. The disclosed method for manufacturing a magnetic field detecting element according to the present invention, is characterized in forming a seed film on the semiconductor substrate, then partially removing the seed film using a predetermined pattern in advance, for insulation of a plurality of coil lines that would be formed on the seed film, forming a soft magnetic core, and cutting off edges of the semiconductor substrate so that a plurality of the coil lines may be insulated.

摘要翻译： 公开了一种能够简化制造工艺并提供薄型磁场检测元件的磁场检测元件的制造方法。 所公开的本发明的磁场检测元件的制造方法的特征在于，在半导体基板上形成种子膜，然后预先使用预定图案来部分地除去种子膜，以绝缘多条线圈线 将形成在种子膜上，形成软磁芯，并切断半导体衬底的边缘，使得多个线圈线可以被绝缘。

公开(公告)号：US20050035761A1

公开(公告)日：2005-02-17

申请号：US10763394

申请日：2004-01-26

申请人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

发明人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

IPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01L43/02

CPC分类号： G01R33/04 ,  G01R15/185 ,  G01R33/05

摘要： In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.

摘要翻译： 在集成在半导体衬底中的磁通门传感器及其制造方法中，磁通门传感器包括形成在半导体衬底上的软磁芯，缠绕软磁芯的励磁线圈，并由上述第一和第二绝缘层绝缘 并且分别在软磁芯和拾取线圈之下，缠绕软磁芯并且分别由激励线圈上方和下方沉积的第三绝缘层和第四绝缘层绝缘。

公开(公告)号：US07145332B2

公开(公告)日：2006-12-05

申请号：US11433570

申请日：2006-05-15

申请人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

发明人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

IPC分类号： G01R33/03

CPC分类号： G01R33/02

摘要： Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

摘要翻译： 公开了一种高灵敏度的磁场传感器，其节能且可以以非常小的尺寸以低成本制造。 磁场传感器包括形成为在半导体衬底上构成封闭磁路的软磁芯，由形成软磁芯的形状的金属膜形成的磁场感测线圈和用于激励软磁芯的驱动线 通过直接向其施加电流的磁芯。 驱动线形成与磁场感测线圈成矩形的角度，并且在长度方向上与软磁芯的两端连接。

公开(公告)号：US20060115918A1

公开(公告)日：2006-06-01

申请号：US11336881

申请日：2006-01-23

申请人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Jun-sik Hwang

发明人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Jun-sik Hwang

IPC分类号： H01L21/00

CPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01F17/0006 ,  H01F41/046

摘要： A method for manufacturing a magnetic field detecting element having a soft magnetic core formed on a substrate, first and second coils, each having coil lines, arranged above and below the core, the method including forming a seed film on the substrate, removing a portion of the seed film using a predetermined pattern so that coil lines constituting the first coil subsequently formed on the seed film are separated, forming a first plating mold having grooves corresponding to the predetermined pattern on an upper portion of the seed film, forming coil lines constituting the first coil by filling the grooves of the first plating mold with metal, forming the soft magnetic core and the second coil on an upper portion of the substrate and on the seed film where the first coil is formed, and cutting off edges of the substrate so that the separated coil lines are insulated.

摘要翻译： 一种用于制造具有形成在基板上的软磁芯的磁场检测元件的方法，所述方法包括在所述基板上方和下方形成具有线圈的第一和第二线圈，所述方法包括在所述基板上形成种子膜， 的种子薄膜，使得构成在种子薄膜上随后形成的第一线圈的线圈线分离，在种子薄膜的上部形成具有对应于预定图案的槽的第一电镀模，形成线圈线， 第一线圈通过用金属填充第一电镀模具的凹槽，在基板的上部和形成第一线圈的种子膜上形成软磁芯和第二线圈，并切断基板的边缘 使分离的线圈线绝缘。

公开(公告)号：US20050077585A1

公开(公告)日：2005-04-14

申请号：US10773456

申请日：2004-02-09

申请人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

发明人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

IPC分类号： H01L43/02 ,  G01R33/02 ,  G01R33/04 ,  H01L43/00 ,  H01L29/82

CPC分类号： G01R33/02

摘要： Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

摘要翻译： 公开了一种高灵敏度的磁场传感器，其节能且可以以非常小的尺寸以低成本制造。 磁场传感器包括形成为在半导体衬底上构成封闭磁路的软磁芯，由形成软磁芯的形状的金属膜形成的磁场感测线圈和用于激励软磁芯的驱动线 通过直接向其施加电流的磁芯。 驱动线形成与磁场感测线圈成矩形的角度，并且在长度方向上与软磁芯的两端连接。

公开(公告)号：US07208947B2

公开(公告)日：2007-04-24

申请号：US10763394

申请日：2004-01-26

申请人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

发明人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

IPC分类号： G01R33/04 ,  G01R33/02

CPC分类号： G01R33/04 ,  G01R15/185 ,  G01R33/05

摘要： In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.

摘要翻译： 在集成在半导体衬底中的磁通门传感器及其制造方法中，磁通门传感器包括形成在半导体衬底上的软磁芯，缠绕软磁芯的励磁线圈，并由上述第一和第二绝缘层绝缘 并且分别在软磁芯和拾取线圈之下，缠绕软磁芯并且分别由激励线圈上下沉积的第三绝缘层和第四绝缘层绝缘。