公开(公告)号：US20110256041A1

公开(公告)日：2011-10-20

申请号：US12914822

申请日：2010-10-28

Applicant: Dustin W. HO ,  Juan Carlos ROCHA-ALVAREZ ,  Hichem M'SAAD

Inventor： Dustin W. HO ,  Juan Carlos ROCHA-ALVAREZ ,  Hichem M'SAAD

IPC: B01D61/00 ,  B01J8/00 ,  B01D53/38 ,  B01D63/00

CPC classification number: C23C16/4402 ,  C23C16/4481 ,  C23C16/52

Abstract: A filter for filtering a fluid in a substrate processing apparatus comprises first and second stages that are connected to one another. A delivery system provides a vaporized liquid to the filter. The first stage of the filter comprises a basic compound, and the second stage of the filter comprises a desiccant. A second filter comprises a permeation filter with permeable membrane to filter the fluid. Methods of filtering the fluid to reduce formation of undesirable process residues using the filter(s) are also described.

Abstract translation: 用于过滤衬底处理设备中的流体的过滤器包括彼此连接的第一和第二阶段。 输送系统向过滤器提供蒸发的液体。 过滤器的第一阶段包括碱性化合物，并且过滤器的第二阶段包括干燥剂。 第二过滤器包括具有可渗透膜的渗透过滤器以过滤流体。 还描述了使用过滤器过滤流体以减少不期望的工艺残余物的形成的方法。