ELECTROCHEMICAL ETCHING AND POLISHING OF CONDUCTIVE SUBSTRATES
    1.
    发明申请
    ELECTROCHEMICAL ETCHING AND POLISHING OF CONDUCTIVE SUBSTRATES 审中-公开
    导电基板的电化学蚀刻和抛光

    公开(公告)号:US20110017608A1

    公开(公告)日:2011-01-27

    申请号:US12843968

    申请日:2010-07-27

    IPC分类号: C25F3/02

    CPC分类号: C25F7/00 C25F3/14

    摘要: A method for electrochemically etching a metal layer through an etch-resist layer pattern using a non-active electrolyte solution is described. The method is particularly useful in fabrication of advanced fuel delivery systems for land-based power generation turbines and aerospace turbine engines; of components for advanced thermal management in aerospace electronic devices and in cooling channels; of stents used in medicine; and of microchannels for sensors, chemical reactors, and dialysis and the like. In one embodiment of the invention the metal layer is copper and the non-active electrolyte solution is a mixture of sodium nitrate and sodium chloride and a pulse electric current is employed to accomplish the electrochemical etching.

    摘要翻译: 描述了使用非活性电解质溶液通过抗蚀剂层图案电化学蚀刻金属层的方法。 该方法在制造用于陆基发电涡轮机和航空航天涡轮发动机的先进燃料输送系统中特别有用; 在航空电子设备和冷却通道中进行先进热管理的部件; 用于医学的支架; 以及用于传感器,化学反应器和透析等的微通道。 在本发明的一个实施方案中,金属层是铜,非活性电解质溶液是硝酸钠和氯化钠的混合物,脉冲电流用于完成电化学蚀刻。

    ELECTROCHEMICAL SYSTEM AND METHOD FOR MACHINING STRONGLY PASSIVATING METALS
    2.
    发明申请
    ELECTROCHEMICAL SYSTEM AND METHOD FOR MACHINING STRONGLY PASSIVATING METALS 审中-公开
    用于加工强力钝化金属的电化学系统和方法

    公开(公告)号:US20110303553A1

    公开(公告)日:2011-12-15

    申请号:US13153874

    申请日:2011-06-06

    IPC分类号: B23H3/00

    摘要: An electrochemical machining system for metals and alloys having a strongly passivating character including an electrolyte solution that is free of hydrofluoric acid, an electrode in contact with the electrolyte solution, a workpiece spaced apart from the electrode and in contact with the electrolyte solution and a power source including a first electrical lead electrically coupled to the electrode and a second electrical lead electrically coupled to the workpiece, the power source being configured to pass an electric current between the electrode and the workpiece, wherein the electric current includes anodic pulses and cathodic pulses, and wherein the cathodic pulses are interposed between at least some of the anodic pulses.

    摘要翻译: 一种具有强钝化特性的金属和合金的电化学加工系统,包括不含氢氟酸的电解质溶液,与电解质溶液接触的电极,与电极间隔开并与电解质溶液接触的工件 源包括电耦合到所述电极的第一电引线和电耦合到所述工件的第二电引线,所述电源被配置为在所述电极和所述工件之间传递电流,其中所述电流包括阳极脉冲和阴极脉冲, 并且其中所述阴极脉冲置于至少一些所述阳极脉冲之间。