公开(公告)号：US20160097398A1

公开(公告)日：2016-04-07

申请号：US14786075

申请日：2014-04-22

Applicant: EDWARDS LIMITED

Inventor： Andrew Waye ,  Emiliano Lucchetta

IPC: F04D29/063 ,  F04D29/058 ,  F04D29/059 ,  F04D19/04

CPC classification number: F04D29/063 ,  F04D19/042 ,  F04D29/058 ,  F04D29/059 ,  F16C19/06 ,  F16C33/6648 ,  F16C2360/45

Abstract: The present disclosure relates to a vacuum pump including a bearing and a lubricant supply system for lubricating the bearing. The lubricant supply system includes: a lubricant reservoir comprising a reservoir matrix for receiving a lubricant; a lubricant transfer arrangement in contact with the reservoir matrix for transferring lubricant from the reservoir matrix to the bearing, the lubricant reservoir including a reservoir enclosure for locating the reservoir matrix in position relative to the lubricant transfer arrangement; wherein the lubricant reservoir includes a plurality of contact regions at which the reservoir matrix is in contact with the reservoir enclosure for locating the reservoir matrix in position relative to the lubricant transfer arrangement and a plurality of spacing regions between respective contact regions at which the reservoir matrix is spaced apart from the reservoir enclosure for receiving gas and lubricant foam caused by outgassing in the lubricant in the reservoir matrix.

Abstract translation: 本公开涉及一种真空泵，其包括用于润滑轴承的轴承和润滑剂供应系统。 润滑剂供应系统包括：润滑剂储存器，其包括用于接收润滑剂的储存器基体; 与储存器基体接触的润滑剂转移装置，用于将润滑剂从储存器基体输送到轴承，润滑剂储存器包括用于将储存器基体相对于润滑剂转移装置定位在储存器壳体中; 其中所述润滑剂储存器包括多个接触区域，在所述多个接触区域中，所述储存器基体与所述储存器壳体接触，用于将所述储存器基体相对于所述润滑剂转移装置定位在相应接触区域之间的多个间隔区域， 与储存器壳体间隔开，用于接收由储存器基体中的润滑剂中的除气引起的气体和润滑剂泡沫。

公开(公告)号：US10190594B2

公开(公告)日：2019-01-29

申请号：US14786075

申请日：2014-04-22

Applicant: Edwards Limited

Inventor： Andrew Waye ,  Emiliano Lucchetta

IPC: F04D29/063 ,  F04D19/04 ,  F04D29/059 ,  F04D29/058 ,  F16C33/66 ,  F16C19/06

Abstract: The present disclosure relates to a vacuum pump including a bearing and a lubricant supply system for lubricating the bearing. The lubricant supply system includes: a lubricant reservoir comprising a reservoir matrix for receiving a lubricant; a lubricant transfer arrangement in contact with the reservoir matrix for transferring lubricant from the reservoir matrix to the bearing, the lubricant reservoir including a reservoir enclosure for locating the reservoir matrix in position relative to the lubricant transfer arrangement; wherein the lubricant reservoir includes a plurality of contact regions at which the reservoir matrix is in contact with the reservoir enclosure for locating the reservoir matrix in position relative to the lubricant transfer arrangement and a plurality of spacing regions between respective contact regions at which the reservoir matrix is spaced apart from the reservoir enclosure for receiving gas and lubricant foam caused by outgassing in the lubricant in the reservoir matrix.

公开(公告)号：US10359047B2

公开(公告)日：2019-07-23

申请号：US15311887

申请日：2015-05-05

Applicant: Edwards Limited

Inventor： Andrew Waye ,  Barrie Dudley Brewster

IPC: F04D29/058 ,  H02K7/09 ,  F16C32/04 ,  H01F7/02 ,  F04D19/04

Abstract: The present invention is directed to a magnet for a magnetic bearing arrangement, a bearing arrangement comprising said magnet, and a vacuum pump comprising said bearing arrangement. In particular the invention can be particularly useful in a magnetic bearing arrangement that reduces stray magnetic fields for a turbomolecular vacuum pump, although it is understood that the invention is not limited to this field and other applications will be understood by the skilled person.

公开(公告)号：US20140035412A1

公开(公告)日：2014-02-06

申请号：US14112457

申请日：2012-05-04

Applicant: Edwards Limited

Inventor： Barrie Dudley Brewster ,  Andrew Waye

IPC: F16C32/04 ,  F16C43/00

CPC classification number: F16C32/04 ,  F16C32/0425 ,  F16C43/00 ,  F16C2360/45 ,  G01P3/487 ,  G01R33/1215 ,  H01F7/0236 ,  Y10T29/49004

Abstract: Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump.

Abstract translation: 在涡轮分子泵中使用的磁轴承组件的旋转磁体阵列中的永磁体的非对称磁化产生的杂散磁场可能对诸如扫描电子显微镜的装置造成重大问题。 为了最小化杂散场，首先测量阵列中每个磁体的至少偶极和四极矩。 然后阵列中的磁体相对于彼此布置，使得偶极子和四极矩都被最小化，从而当磁体阵列在涡轮分子泵中旋转时最小化杂散磁场。