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公开(公告)号：US20200209707A1
公开(公告)日：2020-07-02
申请号：US16619875
申请日：2018-06-19
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James BROOKHYSER , Kurt EATON
Abstract: A beam positioner includes a first acousto-optic (AO) deflector (AOD) comprising an AO cell and a transducer attached to the AO cell, and a wave plate optically contacted to the first AOD.
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