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1.发明公开公开(公告)号：US20240017350A1
公开(公告)日：2024-01-18
申请号：US18253838
申请日：2021-11-23
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Jan KLEINERT , Ruolin CHEN , James BROOKHYSER , Mark UNRATH , Honghua HU
IPC: B23K26/0622 , B23K26/03
CPC classification number: B23K26/0622 , B23K26/03 , B23K2101/42
Abstract: A laser-processing apparatus can carry out a process to form a via in a workpiece, having a first material formed on a second material, by directing laser energy onto the workpiece such that the laser energy is incident upon the first material, wherein the laser energy has a wavelength to which the first material is more reflective than the second material. The apparatus can include a back-reflection sensing system operative to capture a back-reflection signal corresponding to a portion of laser energy directed to the workpiece and reflected by the first material and generate a sensor signal based on the captured back-reflection signal; and a controller communicatively coupled to an output of the back-reflection sensing system, wherein the controller is operative to control a remainder of the process by which the via is formed based on the sensor signal.
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Patent Agency Ranking
公开(公告)号：US20230307883A1
公开(公告)日：2023-09-28
申请号：US18326463
申请日：2023-05-31
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James BROOKHYSER , Jan KLEINERT , Jered RICHTER
CPC classification number: H01S3/1068 , G02B6/42 , G02F1/00 , G02F1/292 , G02F1/33 , H01S5/124 , H01S5/145 , G02B26/06
Abstract: A beam positioner for deflecting a beam path, along which a diffracted beam of linearly polarized laser light is propagatable, within a two-dimensional scan field, the beam positioner includes a first acousto-optic deflectors (AOD) to deflect the beam path within a first one-dimensional scan field extending along a first axis of the two-dimensional scan field, a second AOD to deflect the beam path within a second one-dimensional scan field extending along a second axis of the two-dimensional scan field, a phase retarder arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD and a mirror arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD.
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公开(公告)号：US20230390866A1
公开(公告)日：2023-12-07
申请号：US18252059
申请日：2021-11-23
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James BROOKHYSER , Jan KLEINERT , Jered RICHTER , Mark UNRATH
IPC: B23K26/082 , B23K26/06
CPC classification number: B23K26/0821 , B23K26/0648 , B23K26/0676 , B23K26/0643 , B23K26/0665
Abstract: Numerous embodiments of optical relay systems are disclosed. In one embodiment, a laser-processing apparatus includes an optical relay system configured to correct for beam placement errors by maintaining the optical path length of a beam of laser energy between a first positioner and a scan lens. In another embodiment, the optical relay system may include a first lens, a second lens, and a zoom lens assembly arranged between the first lens and the second lens, wherein the zoom lens assembly includes a first lens group and a second lens group. The zoom lens assembly may be movable relative to the first lens and the second lens (e.g., mounted on a positioner, such as a motion stage). The distance between the lenses of the first lens group and the distance between the lenses of the second lens group may be fixed or variable.
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公开(公告)号：US20250102878A1
公开(公告)日：2025-03-27
申请号：US18729604
申请日：2022-12-05
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James BROOKHYSER , Jan KLEINERT
IPC: G02F1/33
Abstract: Numerous examples of a multi-axis beam positioner operative to deflect a beam path along which laser light along multiple axes are disclosed. The beam positioner includes a first AOD and a second AOD arranged optically in series with each other. The first and second AODs are arranged and configured to deflect the beam path along a different axes of the multi-axis beam positioner. In one example, AO cell of the first AOD and is formed from the same material as the AO cell of the second AOD but the first AOD is configured differently from the second AOD. In other example, the first AOD and the second AOD are longitudinal-mode AODs and no retarder is present between the first and second AODs. In other example, a heat exchanger is provided to cool the AO cell of the second AOD relative to the AO cell of the first AOD.
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公开(公告)号：US20230420905A1
公开(公告)日：2023-12-28
申请号：US18253997
申请日：2021-11-11
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Brian JOHANSEN , Tyler HOWE , Mehmet ALPAY , James BROOKHYSER , Jered RICHTER
CPC classification number: H01S3/1068 , G02F1/332 , G02F2203/22
Abstract: An apparatus includes an acousto-optical deflector (AOD) system operative to deflect a beam of laser energy within a two-dimensional scan field. The AOD system includes a first AOD operative to deflect the beam of laser energy along a first axis of the two-dimensional scan field; a second AOD arranged optically downstream of the first AOD, wherein the second AOD is operative to deflect the beam of laser energy along a second axis of the two-dimensional scan field; and a controller operatively coupled to the AOD system. The controller is configured to drive each of the first AOD and the second AOD to deflect the beam of laser energy within the two-dimensional scan field and is further configured to drive the first AOD and the second AOD at at least substantially the same diffraction efficiency.
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公开(公告)号：US20200209707A1
公开(公告)日：2020-07-02
申请号：US16619875
申请日：2018-06-19
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James BROOKHYSER , Kurt EATON
Abstract: A beam positioner includes a first acousto-optic (AO) deflector (AOD) comprising an AO cell and a transducer attached to the AO cell, and a wave plate optically contacted to the first AOD.
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