公开(公告)号：US20250001524A1

公开(公告)日：2025-01-02

申请号：US18735240

申请日：2024-06-06

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Mark A. UNRATH ,  Andrew BERWICK ,  Alexander A. MYACHIN

IPC: B23K26/364 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/073 ,  B23K26/082 ,  B23K101/40 ,  H01L21/48

Abstract: A system includes a laser source, a galvanometer mirror system, an f-theta scan lens and an acousto-optic deflector (AOD) system. The AOD system is operated to deflect a beam path along which a laser beam propagates in a manner that corrects for scan field distortion induced by one or both of the f-theta lens and galvanometer mirror system.