公开(公告)号：US20220128498A1

公开(公告)日：2022-04-28

申请号：US17506658

申请日：2021-10-20

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Seungeon MOON ,  Jaewoo LEE ,  Jong Jin JUNG ,  Jeong Hun KIM ,  Do Joon YOO ,  Jong Pil IM

IPC: G01N25/30 ,  B81B7/00 ,  B81C1/00

Abstract: Provided is a gas sensor including a substrate, a first membrane disposed on the substrate, a heating structure disposed on the first membrane, a second membrane disposed on the heating structure, a sensing electrode disposed on the second membrane, and a sensing material structure disposed on the sensing electrode. Here, the substrate provides an isolation space defined by a recessed surface obtained as a portion of a top surface of the substrate is spaced downward from a bottom surface of the first membrane, and the first membrane provides a first membrane etching hole that vertically extends to connect a top surface and the bottom surface of the first membrane and is connected with the isolation space. Also, the first membrane etching hole has a diameter of about 3 μm to about 20 μm.