摘要:
Provided is a gas sensor including a substrate, a first membrane disposed on the substrate, a heating structure disposed on the first membrane, a second membrane disposed on the heating structure, a sensing electrode disposed on the second membrane, and a sensing material structure disposed on the sensing electrode. Here, the substrate provides an isolation space defined by a recessed surface obtained as a portion of a top surface of the substrate is spaced downward from a bottom surface of the first membrane, and the first membrane provides a first membrane etching hole that vertically extends to connect a top surface and the bottom surface of the first membrane and is connected with the isolation space. Also, the first membrane etching hole has a diameter of about 3 μm to about 20 μm.
摘要:
Provided are a gas detection method and a gas detector which have a high durability to silicone poisoning and is capable of detecting the type and the concentration of a target gas to be detected with certain accuracy even when the detector is used in an environment where a silicone compound exists. The gas detector employs a contact combustion-type gas sensor which includes two gas detection elements, each intermittently driven, and in which only one gas detection element is supplied with a gas through a silicone removal filter. Acquired in an energization duration of each of the gas detection elements are two or more pieces of output data by the one gas detection element and two or more pieces of output data by the other gas detection element, which constitutes output variation patterns for a test gas. The output variation patterns are contrasted to a reference output variation pattern of each of four largely divided types of reference gases of a paraffinic hydrocarbon gas, a solvent gas, a hydrogen gas, and an argon gas, with the reference output variation patterns being acquired in advance, thereby identifying the type of the target gas being detected in the test gas.
摘要:
A system includes a primary combustible gas sensor and a trigger combustible gas sensor including a first trigger element of low-thermal-mass which includes a first trigger heating element in operative connection with electronic circuitry. The trigger combustible gas sensor also includes a second trigger element of low thermal mass including a second trigger heating element. The second trigger element is also in operative connection with the electronic circuitry. The electronic circuitry further has a first trigger mode of operating in which the first trigger element is heated to a temperature at or above a temperature at which the first trigger element causes combustion of the at least one combustible gas analyte and wherein the second trigger element is operated as a trigger compensating element. The electronic circuitry is configured to operate the trigger combustible gas sensor to detect a value of a response at or above a threshold value. The primary combustible gas sensor is activated from a low-power state upon the threshold value being detected by the trigger combustible gas sensor.
摘要:
This invention is a self-contained NO.sub.x sensor assembly. It may be used to detect NO.sub.x levels in a flowing gas stream such as might be found in an exhaust gas from a combustion process and to produce a measurable electrical output related to the content of NO.sub.x measured. The NO.sub.x sensor assembly is of a configuration that may be detached from a mounting and replaced. The sensor assembly comprises two sensor elements one of which is made up of a catalyst on a temperature measuring device. The other is a gas stream ambient temperature measuring device. The catalyst is selected and configured so that it selectively reduces NO.sub.x and the resulting heat of the reaction raises the temperature of the allied temperature measuring device. The sensor assembly also contains a NO.sub.x reductant source. The sensor assembly may be placed in a moving vehicle for measuring NO.sub.x levels in its exhaust gas.
摘要:
A calorimetric apparatus for determining the calorific content of a fuel gas uses a reactor for producing oxidation of the fuel gas and a combustion gas in the presence of a catalytic oxidizer. The catalytic oxidizer is mounted on one end of a thermo-electric element which element has a heat absorbing end and a heat emitting end when energized by an electric current to produce a Peltier effect. The catalytic end of the element is mounted within the reactor while the other end is located outside of the reactor. The temperatures of the ends of the element are detected by a controller and the difference therebetween is maintained at a predetermined level during the catalytic reaction by the controller developing a control signal to control the supply of the electric current to the element. A display control signal is derived from the control signal by the controller and used to control a display for indicating the calorific content of the fuel gas.
摘要:
Method of and means for accurately measuring the calorific value of combustible gases wherein a mixture of combustible gas and combustion-supporting gas is burned in a pair of flames, the temperatures of the burned gases in both flames being monitored and the volume ratios of the combustion-supporting gas to the combustible gas fed to both burners being adjusted so as to maintain the average of said temperatures at substantially maximum; the volume ratio of said gases which produces said maximum average temperatures varying substantially directly with the calorific value of said combustible gas; the aforesaid calorific value being proportional to said volume ratio of said gases which maximizes said average temperatures; the flow rates of said gases being measured by a single flow sensing system, preferably, of the turbine flowmeter types, or the volumetric flow rate of said combustion-supporting gas being maintained at a constant value while the volumetric flow rate of said combustible gas is being measured; said calorific value measuring method and means being unaffected by ambient temperature and other varying environmental factors. In one embodiment, automatic calibration of the device is obtained by alternately feeding a standard gas and the unknown gas to the burners.
摘要:
A differential thermocouple combustible gas detector is provided by coating one thermocouple junction of a differential thermocouple pair with a catalyst and the other thermocouple junction with a non-catalyst. Heated combustible gases react with the catalyst to liberate heat to the catalyst coated thermocouple junction in proportion to the concentration of combustible gases and proportionally raise the temperature of that junction above the non-catalyst coated junction. The output signal from the differential thermocouple device is thus a signal indicative of the concentration of combustible gases.
摘要:
Methods of and means for measuring the calorific value of combustible gases wherein a mixture of a combustible gas and a combustion-supporting gas is burned in one or more flames, the temperature or temperatures of the burned gases being monitored and the volume ratio of the combustion-supporting gas to the combustible gas being adjusted so as to maintain said temperature or the average of said temperatures at substantially maximum; the volume ratio of said gases which produces said maximum temperature varying substantially directly with the calorific value of said combustible gas.
摘要:
Described is a calorimeter that includes a thermal column, a sample container, a reference container, a thermal shield, a diffusion-bonded block and a thermal plate. One or more heat flux sensors are disposed between the thermal column and the sample container and between the thermal column and the reference container. The thermal shield is in thermal communication with the thermal column and is separated from and substantially encloses the sample container, reference container and thermal column. The diffusion-bonded block includes a first metallic layer having a first thermal conductivity, a second metallic layer having a second thermal conductivity and a third metallic layer having a third thermal conductivity. The second thermal conductivity is different from the first and third thermal conductivities. The first metallic layer is in thermal communication with the base of the thermal column and the third metallic layer is in thermal communication with the thermal plate.
摘要:
A combustible gas sensor that includes a reference sensor. The reference sensor includes a first substrate having a first substrate first surface, a first insulating layer disposed on the first substrate first surface, and a first heater at least one of embedded within the first insulating layer and disposed on the first insulating layer. The first substrate is a MEMS substrate.