FLUID CIRCUIT WITH INTEGRATED ELECTROSTATIC DISCHARGE MITIGATION

    公开(公告)号:US20220356085A1

    公开(公告)日:2022-11-10

    申请号:US17727668

    申请日:2022-04-22

    Applicant: ENTEGRIS, INC.

    Abstract: A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each tubing segment includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of each of the respective tubing segments. Each operative component includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit, wherein each of the tubing connector fittings conductively connect the respective conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.

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