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公开(公告)号:US12083479B2
公开(公告)日:2024-09-10
申请号:US17732472
申请日:2022-04-28
Applicant: ENTEGRIS, INC.
Inventor: Jean Camille L. Ersando , Barry Lee Gregerson
CPC classification number: B01D63/063 , B01D2313/20 , B01D2313/44
Abstract: Described are filter cartridges, filter apparatuses, and related methods that involve a filter cartridge that includes a cartridge support that includes centering surfaces, a helical strand, or both.
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公开(公告)号:US20230182082A1
公开(公告)日:2023-06-15
申请号:US18079745
申请日:2022-12-12
Applicant: ENTEGRIS, INC.
Inventor: Barry Lee Gregerson , Adam Lane Baker
IPC: B01D63/06
CPC classification number: B01D63/06 , B01D2313/16 , B01D2313/19 , B01D2313/21 , B01D2313/086 , B01D2313/201 , B01D2315/08
Abstract: A filter includes a housing having an interior space, in which the housing has at least one opening end. The filter further includes a membrane disposed within the housing that has a length that extends along a length direction of the housing, and a baffle provided at least in the interior space of the housing. The baffle includes at least two baffle partitions that extend along at least a portion of the length of the membrane to divide the interior space of the housing into at least a first portion and a second portion so that when a fluid is supplied to the filter, the fluid is directed to first flow in the first portion and then to the second portion.
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公开(公告)号:US20230149837A1
公开(公告)日:2023-05-18
申请号:US17981571
申请日:2022-11-07
Applicant: ENTEGRIS, INC.
Inventor: Barry Lee Gregerson , Jeffrey J. McKenzie , James C. Linder , Hayden Lincicome , John A. Leys
IPC: B01D27/10
CPC classification number: B01D27/106 , B01D2201/29 , B01D2201/304
Abstract: A removable filter cartridge includes a filter housing containing a filter, a sealing valve coupled to an open end of the filter housing and configured to removably couple the removable filter cartridge to a filter head. The sealing valve has an open position and a closed position that seals the filter housing, and is configured to maintain a seal of the filter housing while uncoupled from the filter head. A sealing valve includes a first end to be removably coupled to a filter head and a second end to be coupled to a filter housing to form a removable filter cartridge. A method of retrofitting a filter housing includes removing the filter housing from a filter head, coupling a sealing valve to the filter housing to form a removable filter cartridge, and removably coupling the removable filter cartridge to the filter head.
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公开(公告)号:US12062560B2
公开(公告)日:2024-08-13
申请号:US18107325
申请日:2023-02-08
Applicant: ENTEGRIS, INC.
Inventor: Russ V. Raschke , Shawn D. Eggum , Barry Lee Gregerson
IPC: H01L21/673
CPC classification number: H01L21/67359 , H01L21/67369
Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.
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公开(公告)号:US20230187246A1
公开(公告)日:2023-06-15
申请号:US18107325
申请日:2023-02-08
Applicant: ENTEGRIS, INC.
Inventor: Russ V. Raschke , Shawn D. Eggum , Barry Lee Gregerson
IPC: H01L21/673
CPC classification number: H01L21/67359 , H01L21/67369
Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.
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公开(公告)号:US20230134445A1
公开(公告)日:2023-05-04
申请号:US17977762
申请日:2022-10-31
Applicant: ENTEGRIS, INC.
Inventor: Jean Camille Lu Ersando , Barry Lee Gregerson
Abstract: A filter assembly for filtering liquid includes a filter housing and a filter cartridge disposed in an enclosed space of the filter housing. The filter housing including a cap affixed to the bowl to form the enclosed space. The cap including a fluid inlet port, a fluid outlet port, and a gas venting port for the enclosed space. The filter cartridge includes radial projections disposed in slots of the bowl blocking rotation of the filter cartridge relative to the bowl. A method of making a filter assembly includes inserting a filter cartridge into a bowl, and affixing the cap to the bowl.
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公开(公告)号:US20220356085A1
公开(公告)日:2022-11-10
申请号:US17727668
申请日:2022-04-22
Applicant: ENTEGRIS, INC.
Inventor: John Leys , James C. Linder , Jeffrey James McKenzie , Barry Lee Gregerson , Brett Christopher Reichow
Abstract: A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each tubing segment includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of each of the respective tubing segments. Each operative component includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit, wherein each of the tubing connector fittings conductively connect the respective conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.
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公开(公告)号:US20240375054A1
公开(公告)日:2024-11-14
申请号:US18780230
申请日:2024-07-22
Applicant: ENTEGRIS, INC.
Inventor: Jean Camille Lu Ersando , Barry Lee Gregerson
IPC: B01D63/06
Abstract: Described are filter cartridges, filter apparatuses, and related methods that involve a filter cartridge that includes a cartridge support that includes centering surfaces, a helical strand, or both.
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公开(公告)号:US20220387911A1
公开(公告)日:2022-12-08
申请号:US17833024
申请日:2022-06-06
Applicant: ENTEGRIS, INC.
Inventor: Jeffrey J. McKenzie , James C. Linder , Barry Lee Gregerson , Hayden Lincicome
IPC: B01D29/96 , B01D35/153 , B01D29/66 , B01D29/11 , B01D35/30
Abstract: A removable filter cartridge includes a filter housing containing a filter and a sealing valve coupled to an open end of the filter housing. The sealing valve configured to removably couple the removable filter cartridge to a filter head. An open position allows fluid to flow into and out of the internal volume of the filter housing. A closed position seals the filter housing. A method for retrofitting a filter housing includes removing the filter housing from a filter head, coupling a sealing valve to the removable filter to form a removable filter cartridge, and coupling the removable filter cartridge to the filter head.
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公开(公告)号:US20220347631A1
公开(公告)日:2022-11-03
申请号:US17732472
申请日:2022-04-28
Applicant: ENTEGRIS, INC.
Inventor: Jean Camille L. Ersando , Barry Lee Gregerson
IPC: B01D63/06
Abstract: Described are filter cartridges, filter apparatuses, and related methods that involve a filter cartridge that includes a cartridge support that includes centering surfaces, a helical strand, or both.
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