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公开(公告)号：US20230084930A1
公开(公告)日：2023-03-16
申请号：US17944904
申请日：2022-09-14
Applicant: ENTEGRIS, INC.
Inventor： Carlo Waldfried , Jakub Rybczynski , Florentina Popa , Murat Yaldizli
IPC: H01L21/683
Abstract: Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.
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