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公开(公告)号：US11333302B2
公开(公告)日：2022-05-17
申请号：US16375000
申请日：2019-04-04
申请人： ENTEGRIS, INC.
摘要： Described are storage and dispensing vessels and related systems and methods, for dispensing reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium, the reagent gas being contained at super-atmospheric pressure and the solid adsorbent medium comprising a metal-organic framework.
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公开(公告)号：US10508773B2
公开(公告)日：2019-12-17
申请号：US16271339
申请日：2019-02-08
申请人： ENTEGRIS, INC.
发明人： Joseph D. Sweeney , Edward Edmiston Jones , Joseph Robert Despres , Richard S. Ray , Peter C. Van Buskirk , Edward A. Sturm , Christopher Scannell
摘要： A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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