公开(公告)号：US11143329B2

公开(公告)日：2021-10-12

申请号：US16564496

申请日：2019-09-09

申请人： ENTEGRIS, INC. ,  LUXEMBOUG PATENT COMPANY SA

发明人： Christopher Scannell ,  Joseph R. Despres ,  Pascal Chir ,  Paul Muzzo

IPC分类号： F16K37/00 ,  F17C13/04

摘要： A valve system having a valve position indicator is disclosed. The valve position indicator allows for viewing of the valve position from one or more viewing locations. In one example, the valve position indicator includes a side valve open/close indicator and a top valve open/close indicator on a valve assembly. An indicator locking mechanism securely locks the valve position indicator in alignment with a position of a control valve.

公开(公告)号：US10508773B2

公开(公告)日：2019-12-17

申请号：US16271339

申请日：2019-02-08

申请人： ENTEGRIS, INC.

发明人： Joseph D. Sweeney ,  Edward Edmiston Jones ,  Joseph Robert Despres ,  Richard S. Ray ,  Peter C. Van Buskirk ,  Edward A. Sturm ,  Christopher Scannell

IPC分类号： G06K19/06 ,  F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/07

摘要： A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20210370259A1

公开(公告)日：2021-12-02

申请号：US17398891

申请日：2021-08-10

申请人： ENTEGRIS, INC.

发明人： Lawrence H. Dubois ,  Donald J. Carruthers ,  Melissa A. Petruska ,  Edward A. Sturm ,  Shaun M. Wilson ,  Steven M. Lurcott ,  Bryan C. Hendrix ,  Joseph D. Sweeney ,  Michael J. Wodjenski ,  Oleg Byl ,  Ying Tang ,  Joseph R. Despres ,  Matthew Thomas Marlow ,  Christopher Scannell ,  Daniel Elzer ,  Kavita Murthi

IPC分类号： B01J20/10 ,  B01J20/20 ,  B01J20/22 ,  B01J20/28 ,  F17C11/00 ,  H01L21/67 ,  B01J20/26 ,  B01J20/02

摘要： Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.

公开(公告)号：US20200206717A1

公开(公告)日：2020-07-02

申请号：US15773652

申请日：2016-11-04

申请人： ENTEGRIS, INC.

发明人： Lawrence H. Dubois ,  Donald J. Carruthers ,  Melissa A. Petruska ,  Edward A. Sturm ,  Shaun M. Wilson ,  Steven M. Lurcott ,  Bryan C. Hendrix ,  Joseph D. Sweeney ,  Michael J. Wodjenski ,  Oleg Byl ,  Ying Tang ,  Joseph R. Despres ,  Matthew Thomas Marlow ,  Christopher Scannell ,  Daniel Elzer ,  Kavita Murthi

IPC分类号： B01J20/10 ,  B01J20/28 ,  B01J20/22 ,  B01J20/20 ,  H01L21/67 ,  F17C11/00

摘要： Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.