公开(公告)号：US11610795B2

公开(公告)日：2023-03-21

申请号：US16552005

申请日：2019-08-27

Applicant: ENTEGRIS, INC.

Inventor： Mark V. Smith ,  Nicholas Thelen ,  Matthew A. Fuller ,  Michael C. Zabka ,  Sung In Moon ,  John P. Puglia

IPC: H01L21/673 ,  H01L21/67

Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

公开(公告)号：US20230197490A1

公开(公告)日：2023-06-22

申请号：US18109756

申请日：2023-02-14

Applicant: ENTEGRIS, INC.

Inventor： Mark V. Smith ,  Nicholas Thelen ,  Matthew A. Fuller ,  Michael C. Zabka ,  Sung In Moon ,  John P. Puglia

IPC: H01L21/673 ,  H01L21/67

CPC classification number: H01L21/67393 ,  H01L21/67386 ,  H01L21/67376 ,  H01L21/67017

Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

公开(公告)号：US11901205B2

公开(公告)日：2024-02-13

申请号：US18109756

申请日：2023-02-14

Applicant: ENTEGRIS, INC.

Inventor： Mark V. Smith ,  Nicholas Thelen ,  Matthew A. Fuller ,  Michael C. Zabka ,  Sung In Moon ,  John P. Puglia

IPC: H01L21/673 ,  H01L21/67

CPC classification number: H01L21/67393 ,  H01L21/67017 ,  H01L21/67376 ,  H01L21/67386

Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.