公开(公告)号：US20140312736A1

公开(公告)日：2014-10-23

申请号：US14290705

申请日：2014-05-29

Applicant: EPCOS AG

Inventor： Werner Ruile ,  Markus Hauser ,  Christoph Eggs ,  Hans-Peter Kirschner

IPC: H03H9/25

CPC classification number: H03H9/25 ,  H01L21/02244 ,  H01L21/31683 ,  H03H3/08 ,  H03H9/0222 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4902 ,  Y10T29/4908 ,  Y10T29/4913 ,  Y10T29/49147

Abstract: An electroacoustic component includes a substrate configured to carry acoustic waves. The electroacoustic component can be a guided bulk acoustic wave (GBAW) device, for example. A structured electric conductive layer is arranged on the substrate and an electrically dielectric layer (for example, aluminum oxide) is also arranged over the substrate.

Abstract translation: 电声部件包括被配置为承载声波的基板。 例如，电声部件可以是引导体声波（GBAW）装置。 在基板上配置有结构化的导电层，在基板上还配置有电介质层（例如，氧化铝）。