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公开(公告)号：US20240316771A1
公开(公告)日：2024-09-26
申请号：US18607600
申请日：2024-03-18
申请人： ETEL S.A.
发明人： Basile Renaud GRAF , Ralph COLEMAN
CPC分类号： B25J9/1664 , F16F15/02
摘要： A method is provided for detecting a mechanical end stop of a motion system comprising a base designed to receive a motion stage, a machine frame and an active isolation system comprising actuators arranged to impart a six degree-of-freedom (DOF) motion to the base, inertial sensors arranged to provide a six DOF measurement, the mechanical end stop being arranged to limit the base's motion relative to the machine frame. The method includes selecting a translational DOF, and determining, using a process sensitivity matrix of a mechanical system comprising the base and the active isolation system, a force to be applied to the base by the actuators to cause an oscillatory motion of the base in the translational DOF. The method further includes applying the force to obtain the oscillatory motion, and detecting a mechanical contact between the base and the mechanical end stop using the inertial sensors.
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公开(公告)号：US20240310823A1
公开(公告)日：2024-09-19
申请号：US18596859
申请日：2024-03-06
申请人： ETEL S.A.
发明人： Basile Renaud GRAF , Ralph COLEMAN
CPC分类号： G05B23/0262 , G01B11/002 , G05B23/0221 , G05B2219/24065
摘要： A diagnostic method localizes technical faults in a motion system that includes a base adapted to receive a motion stage for equipment, a machine frame resting on the floor, dampers adapted to support the base, and an active isolation system arranged between the base and the machine frame. The active isolation system and the base form a mechanical system. The active isolation system includes actuators, adapted to impart six degree-of-freedom (DOF) motion to the base in a reference frame, and inertial sensors adapted to provide a six DOF measurement of the base's motion. The method includes: i) applying a control signal for actuating or contributing to the actuation of the actuators of the active isolation system to impart a motion to the base; ii) obtaining, with the inertial sensors, a six DOF measurement of the base's motion relative to a reference point; iii) creating a measured process sensitivity matrix of the mechanical system using the six DOF measurement; and iv) determining, based on the measured process sensitivity matrix, whether all the actuators and sensors of the active isolation system are working as expected and/or whether there is a pivot point impeding the movement of the base.
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