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公开(公告)号：US20220270896A1
公开(公告)日：2022-08-25
申请号：US17741789
申请日：2022-05-11
发明人： Daniel Figura
摘要： A device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface. The first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
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公开(公告)号：US11361980B2
公开(公告)日：2022-06-14
申请号：US16459649
申请日：2019-07-02
发明人： Daniel Figura
摘要： A device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface. The first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
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公开(公告)号：US20160322249A1
公开(公告)日：2016-11-03
申请号：US15194652
申请日：2016-06-28
发明人： Daniel Figura
CPC分类号： H01L21/67092 , H01L21/67259 , H01L21/681
摘要： Device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform. The device includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface, wherein the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
摘要翻译： 用于将第一基板的第一接触表面与可以保持在第二平台上的第二基板的第二接触表面对准的装置和方法。 该装置包括沿着第一接触表面定位的第一对准键的第一XY位置和对应于第一对准键并且沿着第二接触表面定位的第二对准键的第二XY位置，其中第一接触表面可以对准 基于第一对准位置中的第一XY位置，并且第二接触表面可以基于第二对准位置中的第二XY位置对准。
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公开(公告)号：US12027383B2
公开(公告)日：2024-07-02
申请号：US17741789
申请日：2022-05-11
发明人： Daniel Figura
CPC分类号： H01L21/67092 , H01L21/67259 , H01L21/681
摘要： A device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface. The first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
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公开(公告)号：US20190326137A1
公开(公告)日：2019-10-24
申请号：US16459649
申请日：2019-07-02
发明人： Daniel Figura
摘要： A device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface. The first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
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公开(公告)号：US10388545B2
公开(公告)日：2019-08-20
申请号：US15194652
申请日：2016-06-28
发明人： Daniel Figura
摘要： Device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform. The device includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface, wherein the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
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