公开(公告)号：US20230114695A1

公开(公告)日：2023-04-13

申请号：US17906129

申请日：2021-03-11

Applicant: Edwards Japan Limited

Inventor： Kenya Nagase ,  Haruki Suzuki ,  Yongwei Shi

IPC: F04D29/58 ,  F04D19/04 ,  F04D25/06

Abstract: A vacuum pump and a vacuum pump component are provided that achieve the efficient heat dissipation of the rotor without changing the material or structure of stator blades or rotor blades. The vacuum pump includes a casing having a gas inlet port and a gas outlet port and a rotor configured to rotate in the casing. The vacuum pump is configured to exhaust gas from the gas inlet port to the gas outlet port by rotation of the rotor. The rotor substantially has the shape of a cylinder. A purge gas flows between the inner circumference surface of the rotor and the stator column that faces at least a part of the inner circumference surface of the rotor. A projection or a groove that disturbs the flow of the purge gas is provided in the flow passage of the purge gas.