公开(公告)号：US20230277974A1

公开(公告)日：2023-09-07

申请号：US18006057

申请日：2021-07-27

Applicant: Edwards Limited

Inventor： Andrew James Seeley ,  Stephen Cotlle ,  Neil Condon ,  Christopher Bailey ,  Julian Dean ,  Joanne Greenwood ,  Zachary Dunbar

IPC: B01D53/02 ,  B01D53/047 ,  B01D53/14 ,  B01D53/82 ,  B01D53/54 ,  B01D53/44

CPC classification number: B01D53/025 ,  B01D53/0476 ,  B01D53/1493 ,  B01D53/82 ,  B01D53/54 ,  B01D53/44 ,  B01D2256/18 ,  B01D2258/02 ,  B01D2257/102 ,  B01D2257/108 ,  B01D2257/2066

Abstract: A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.