公开(公告)号：US12014913B2

公开(公告)日：2024-06-18

申请号：US17640673

申请日：2020-09-04

Applicant: Edwards Vacuum LLC

Inventor： Evan Privet ,  Marcus Hans Robert Thierley

IPC: H01J41/12 ,  F04B37/02 ,  H01J17/22 ,  H01J17/24

CPC classification number: H01J41/12 ,  F04B37/02 ,  H01J17/22 ,  H01J17/24

Abstract: An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.

公开(公告)号：US20220328294A1

公开(公告)日：2022-10-13

申请号：US17640673

申请日：2020-09-04

Applicant: Edwards Vacuum LLC

Inventor： Evan Privet ,  Marcus Hans Robert Thierley

IPC: H01J41/12

Abstract: An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.