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公开(公告)号：US12014913B2
公开(公告)日：2024-06-18
申请号：US17640673
申请日：2020-09-04
申请人： Edwards Vacuum LLC
摘要： An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.
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公开(公告)号：US20240145222A1
公开(公告)日：2024-05-02
申请号：US18546679
申请日：2021-11-17
IPC分类号： H01J41/12
CPC分类号： H01J41/12
摘要： An electrohydrodynamic ventilation device with at least one emitter electrode (4) and at least two collector electrodes (3) defining an acceleration channel (6) for the flow of ionic wind between the at least two collector electrodes (3), where the at least one emitter electrode (4) is disposed on the channel (6), throughout the length of the channel (6), where the at least one emitter electrode (4) is configured to be anchored to supports (5) made of insulating material, where each support (5) has a projection section (5′) that is interposed between the at least one emitter electrode (4) and each end (3′) of the at least two collector electrodes (3).
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公开(公告)号：US10014145B2
公开(公告)日：2018-07-03
申请号：US15595290
申请日：2017-05-15
CPC分类号： H01J11/52 , H01J11/20 , H01J11/46 , H01J21/02 , H01J21/18 , H01J37/32724 , H01J37/32816 , H01J37/32834 , H01J41/12 , H01J41/16
摘要： A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.
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公开(公告)号：US09265139B2
公开(公告)日：2016-02-16
申请号：US13996466
申请日：2011-12-20
CPC分类号： H05H13/005 , H01J27/18 , H01J41/12 , H05H2007/082
摘要： An electron cyclotron resonance ionization device includes a sealed vacuum chamber configured to contain a plasma, an electromagnetic wave injector to inject an electromagnetic wave into the sealed chamber, a magnetic structure for generating a magnetic field in the chamber and for generating a plasma along the magnetic field lines, the modulus of the magnetic field forming a magnetic mirror structure, with at least one electron cyclotron resonance region. The sealed chamber is a waveguide having a length that is greater than or equal to the guide wavelength corresponding to the frequency of the injected electromagnetic wave, and the plasma is ignited without prior injection of gas.
摘要翻译： 电子回旋共振离子化装置包括被配置为容纳等离子体的密封真空室，将电磁波注入到密封室中的电磁波注入器，用于在室内产生磁场并沿着磁性产生等离子体的磁结构 场线，形成磁镜结构的磁场的模量与至少一个电子回旋共振区域。 密封室是具有大于或等于对应于注入的电磁波的频率的引导波长的长度的波导，并且在没有预先注入气体的情况下点燃等离子体。
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公开(公告)号：US20060055637A1
公开(公告)日：2006-03-16
申请号：US11205050
申请日：2005-08-17
申请人： Ihachiro Gofuku , Masaru Kamio , Hisanori Tsuda , Yasue Sato , Yoshiyuki Shimada , Hiromasa Mitani , Kazuyuki Seino , Takashi Nishimura
发明人： Ihachiro Gofuku , Masaru Kamio , Hisanori Tsuda , Yasue Sato , Yoshiyuki Shimada , Hiromasa Mitani , Kazuyuki Seino , Takashi Nishimura
摘要： Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor connected in series with the ion pump with respect to a power supply for driving the ion pump. Even if internal resistance of the ion pump undergoes order-of-magnitude changes according to its operating state, current consumption can be suppressed and the ion pump can be driven efficiently.
摘要翻译： 本发明提供一种图像显示装置，包括：真空容器，其内装有用于显示图像的电子源; 离子泵与真空容器连通，用于从其中排出空气并减小其中的压力; 以及与离子泵相对于用于驱动离子泵的电源串联连接的电阻器。 即使离子泵的内部电阻根据其运行状态而发生数量级的变化，也可以抑制电流消耗，能够有效地驱动离子泵。
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公开(公告)号：US20060043871A1
公开(公告)日：2006-03-02
申请号：US11205062
申请日：2005-08-17
申请人： Masaru Kamio , Ihachiro Gofuku , Hisanori Tsuda , Yasue Sato
发明人： Masaru Kamio , Ihachiro Gofuku , Hisanori Tsuda , Yasue Sato
IPC分类号： H01J1/62
摘要： An image display apparatus is provided with a vacuum chamber consisting of an electron source substrate and an image display substrate, and an ion pump which is attached to an electron-emitting substrate or the image display substrate and exhausts air from the vacuum chamber by the action of a magnet, wherein the magnet is attached and fixed to the substrate to which the ion pump has been attached. Thereby, the image display apparatus prevents the magnet from applying an excessive force to the ion pump by its weight, and acquires a stable structure without causing a vacuum leak.
摘要翻译： 图像显示装置设置有由电子源基板和图像显示基板构成的真空室，以及安装在电子发射基板或图像显示基板上的离子泵，并通过动作排出来自真空室的空气 的磁体，其中所述磁体被附接并固定到已经附接有离子泵的基板。 因此，图像显示装置防止磁体通过其重量对离子泵施加过大的力，并且获得稳定的结构而不会引起真空泄漏。
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公开(公告)号：US20060043865A1
公开(公告)日：2006-03-02
申请号：US11210766
申请日：2005-08-25
申请人： Ihachiro Gofuku , Masaru Kamio , Hisanori Tsuda , Yasue Sato , Yoshiyuki Shimada , Hiromasa Mitani , Kazuyuki Seino , Takashi Nishimura
发明人： Ihachiro Gofuku , Masaru Kamio , Hisanori Tsuda , Yasue Sato , Yoshiyuki Shimada , Hiromasa Mitani , Kazuyuki Seino , Takashi Nishimura
IPC分类号： H01J27/26
CPC分类号： H01J7/18 , H01J7/14 , H01J9/385 , H01J29/845 , H01J29/94 , H01J31/127 , H01J41/12 , H01J2329/943
摘要： Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container is composed of a non-electroconductive material; and an electroconductive film is formed on an external surface of the vacuum container on a side on which the ion pump container is mounted or on an internal surface of the ion pump container. The image display apparatus achieves: a reduction in weight of the ion pump; an improvement in compatibility to the vacuum container; and the prevention of an adverse effect of discharge inside the ion pump on image display.
摘要翻译： 提供一种图像显示装置，包括：真空容器，其包括电子源和与电子源相对的阳极电极; 离子泵，其设置成通过真空容器连通，其中：离子泵容器由非导电材料构成; 并且在真空容器的安装有离子泵容器的一侧的外表面上或离子泵容器的内表面上形成导电膜。 图像显示装置实现：离子泵的重量减少; 改善与真空容器的相容性; 并防止离子泵内的放电的不良影响对图像显示。
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公开(公告)号：US20040062659A1
公开(公告)日：2004-04-01
申请号：US10620288
申请日：2003-07-14
发明人： Mahadeva P. Sinha
IPC分类号： H01J007/16
CPC分类号： H01J41/12
摘要： An one pump is formed with its housing made of titanium so that the housing can form the cathode of the ion pump. Cylindrical anodes may be formed inside the housing. Spikes or posts may be formed on the walls of the housing and may extend into the inside of the anodes.
摘要翻译： 一个泵由其由钛构成的壳体形成，从而外壳可以形成离子泵的阴极。 圆柱形阳极可以形成在壳体内。 钉或柱可以形成在壳体的壁上并且可以延伸到阳极的内部。
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公开(公告)号：US4713619A
公开(公告)日：1987-12-15
申请号：US799411
申请日：1985-11-19
申请人： Mario Busso , Marco Pierini
发明人： Mario Busso , Marco Pierini
IPC分类号： G01L23/30 , G01L21/00 , G01L21/30 , G05F1/20 , H01J41/12 , H02M5/293 , H02P13/06 , F04B37/14
摘要： An electronic device for feeding an ion pump with two different tensions and for improved measuring of the pressure in the pump, the two different tensions being a normal operating tension and a lower tension at which a correct measurement of the pressure can be made in a pressure range up to beyond 10.sup.-10 torr. through a transformer whose primary or secondary winding is divided into two sections that can be connected and separated by switches controlled by oscillator circuits. Alternatively feeding at two different tensions can be obtained by feeding to the primary winding of the transformer a pulsed tension having a rectangular wave form and a high frequency controlled by a field effect transistor having an isolated gate. A sampling and holding circuit permits the pressure to be measured only in the conditions of feeding at the lower tension.
摘要翻译： 用于给具有两个不同张力的离子泵进料的电子装置，并且用于改进泵中的压力的测量，两个不同的张力是正常的操作张力和较低的张力，在该张力下可以在压力下进行正确的压力测量 范围可达10-10 torr以上。 通过变压器，其初级或次级绕组被分成两部分，可以由振荡器电路控制的开关连接和分离。 或者，通过向变压器的初级绕组馈送具有矩形波形的脉冲张力和由具有隔离栅极的场效应晶体管控制的高频，可以获得两种不同张力的馈电。 采样和保持电路仅允许在较低张力的馈送条件下测量压力。
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公开(公告)号：US3868239A
公开(公告)日：1975-02-25
申请号：US35258373
申请日：1973-04-19
申请人： PHILIPS CORP
发明人： VISSER JAN
CPC分类号： B01D53/0446 , F04B37/02 , H01J41/12
摘要： A sorption pumping device characterized in that a space to be evacuated can be connected to the sorption material successively at at least two different levels of the device.
摘要翻译： 一种吸附泵送装置，其特征在于，要在所述装置的至少两个不同水平处连续地将待抽真空的空间连接到所述吸附材料。
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