公开(公告)号：US20250164831A1

公开(公告)日：2025-05-22

申请号：US18840974

申请日：2023-02-15

Applicant: Electro Scientific Industries, Inc.

Inventor： Mehmet ALPAY ,  Jered RICHTER ,  Tyler HOWE ,  Yuan LIU ,  Fumiyo YOSHINO ,  Brian JOHANSEN ,  Scott ROSENBALM ,  Mark UNRATH ,  Manyam KAJA ,  James BROOKHYSER ,  Patrick KAIN ,  Matthew JOHNSTON ,  Steve MELIZA ,  Chris LINDSLEY ,  Andrew STEVENS

IPC: G02F1/11 ,  G02B26/08 ,  G02B26/10 ,  H01S3/106

Abstract: A system includes a first acousto-optic deflector (AOD) for diffracting an incident beam of laser energy to produce and output therefrom a first beam of laser energy and a second beam of laser light, a second AOD arranged to receive the first beam of laser energy and for diffracting the received first beam of laser energy to thereby produce and output therefrom a third beam of laser energy and a fourth beam of laser energy, at least one first beam trap arranged and configured to absorb the second beam of laser energy output from the first AOD, at least one second beam trap arranged and configured to absorb the fourth beam of laser energy output from the second AOD and a controller communicatively coupled to the first AOD and to the second AOD, wherein the controller is configured to operate of the first AOD while not operating the second AOD.