公开(公告)号：US20190319599A1

公开(公告)日：2019-10-17

申请号：US16137378

申请日：2018-09-20

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hyunjoong Lee ,  Yi-Gyeong Kim ,  Yil Suk Yang ,  Woo Seok Yang ,  Chang Han Je

IPC: H03G3/30 ,  G01N9/00 ,  H03M3/00

Abstract: A resonator-based sensor and a sensing method thereof for sensing a change in a material that is subject to be sensed which include: generating an oscillation voltage signal by amplifying a current signal output from a resonator in accordance with a physical-chemical change of the material; and generating a gain control signal corresponding to a motional resistance and a clock signal corresponding to a resonant frequency of the resonator are provided.

公开(公告)号：US11467077B2

公开(公告)日：2022-10-11

申请号：US16735899

申请日：2020-01-07

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Chang Han Je ,  Yil Suk Yang ,  Hyunjoong Lee

IPC: G01N11/16 ,  H01L41/113 ,  H01L41/053

Abstract: Provided is a fluid viscosity measuring device including a support structure having an opening part, the opening part penetrating the support structure in a first direction, a driving resonator fixed to the support structure and extending to overlap the opening part, and a detection resonator fixed to the support structure and extending parallel to the driving resonator, the detection resonator being spaced apart from the driving resonator in the first direction. The driving resonator includes a first piezoelectric body. The detection resonator includes a second piezoelectric body. The first piezoelectric body and the second piezoelectric body have the same shape.