公开(公告)号：US09518933B2

公开(公告)日：2016-12-13

申请号：US14433363

申请日：2013-10-12

Applicant: Entegris, Inc.

Inventor： Thomas E. Chatterton ,  Sebum Cheon

IPC: G01N21/00 ,  G01N21/95 ,  G01B11/00 ,  G01N21/88 ,  G01B13/00 ,  G01B11/30

CPC classification number: G01N21/95 ,  G01B11/00 ,  G01B11/303 ,  G01B13/00 ,  G01N21/8806 ,  G01N2201/06113 ,  G01N2201/062

Abstract: An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels.

Abstract translation: 描述了一种用于流体分配阀的质量保证确定的光电检查系统，例如安装在流体存储和分配容器上，以及存储用于这种质量保证确定的机器可执行指令的相关方法和非暂时性计算机可读介质。 光电检测适用于流体储存和分配包装上使用的流量控制阀，包括物理吸附剂和/或压力调节容器，例如用于供应半导体产品制造中使用的加工液体，平板显示器， 和太阳能电池板。