公开(公告)号：US20230039933A1

公开(公告)日：2023-02-09

申请号：US17790382

申请日：2020-01-20

申请人： EPICMEMS(XIAMEN) CO., LTD.

发明人： Jiang JIANG ,  Ping LI ,  Wei WANG ,  Mingguo ZHU ,  Nianchu HU ,  Bin JIA

IPC分类号： H03H9/54 ,  H03H9/13 ,  H03H9/17

摘要： The present disclosure provides a radio frequency filter, including: a substrate; a supporting electrode protruded on a front surface of the substrate; and a thin film structure formed on the substrate and spaced with the substrate by the supporting electrode. An end surface of a top end of the supporting electrode is in sealing contact with a front surface of the thin film structure.

公开(公告)号：US20230126725A1

公开(公告)日：2023-04-27

申请号：US17793811

申请日：2020-01-20

申请人： Epicmems (Xiamen) Co., Ltd.

发明人： Jiang JIANG ,  Ping LI ,  Wei WANG ,  Mingguo ZHU ,  Nianchu HU ,  Bin JIA

IPC分类号： H03H9/64 ,  H03H9/25

摘要： The present disclosure provides a method of preparing a radio frequency filter, including: a substrate; a supporting electrode protruded on a front surface of the substrate; and a thin film structure formed on the substrate and spaced with the substrate by the supporting electrode. An end surface of a top end of the supporting electrode is in sealing contact with a front surface of the thin film structure.