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    Optical method and apparatus for measuring surface topography of an object
    8.
    发明授权
    Optical method and apparatus for measuring surface topography of an object 失效
    用于测量物体的表面形貌的光学方法和装置

    公开(公告)号：US5636030A

    公开(公告)日：1997-06-03

    申请号：US432058

    申请日：1995-05-01

    申请人： Douglas C. Limbach

    发明人： Douglas C. Limbach

    IPC分类号： G01B11/24 ,  G01B11/10 ,  G02B26/08

    CPC分类号： G01B11/2433

    摘要： An optical method and apparatus are disclosed for determining characteristics of an object such as its size, shape, position, orientation, cross-sectional area, volume, surface topography and specific volume. The inventive method and apparatus utilize a laser beam which is reflected through a right angle by a multi-faceted mirror. The mirror rotates about its own axis as it orbits around the object to be measured, causing a plurality of rotary scanning beams to sweep inwardly across the object as the mirror orbits. Portions of the scanning beam that are not blocked by the object strike a retroreflective ring positioned around the object and are returned along the beam's incident path to a detector. By associating the corresponding orbital position and rotational orientation of the mirror with the detector signal each time a shadow is created by the object, tangents to the surface of the object can be calculated. The tangents gathered during each orbit can then be assimilated to determine the cross-section of the object in the plane of the mirror's orbit. Changing the relative longitudinal position between the orbiting mirror and the object allows successive cross-sections to be determined and combined to calculate the total surface topography or volume of the object.

    摘要翻译： 公开了一种用于确定物体的特征的光学方法和装置，例如其尺寸，形状，位置，取向，横截面积，体积，表面形貌和比体积。 本发明的方法和装置利用通过多面反射镜以直角反射的激光束。 当镜子围绕要测量的物体轨道绕着自己的轴线旋转时，当镜子轨道运动时，多个旋转扫描光束向内扫过物体。 不被物体阻挡的扫描光束的部分撞击位于物体周围的回射环，并且沿着光束的入射路径返回到检测器。 通过每次由对象创建阴影时，通过将反射镜的相应轨道位置和旋转方向与检测器信号相关联，可以计算对象表面的切线。 每个轨道收集的切线可以被吸收，以确定物体在镜子的轨道平面内的横截面。 改变轨道反射镜和物体之间的相对纵向位置允许确定并组合连续的横截面以计算物体的总表面形貌或体积。