公开(公告)号：US06231054B1

公开(公告)日：2001-05-15

申请号：US09217383

申请日：1998-12-21

申请人： Ernest E. Allen, Jr. ,  Robert J. Mitchell ,  Perry J. I. Justesen ,  Alexander F. Pless

发明人： Ernest E. Allen, Jr. ,  Robert J. Mitchell ,  Perry J. I. Justesen ,  Alexander F. Pless

IPC分类号： F16J300

CPC分类号： F16J3/047

摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.

摘要翻译： 改进的波纹管组件（18）被提供用于例如离子注入机（10）。 波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（54），用于将波纹管组件可滑动地安装到第二真空室（15）上; 和位于第一和第二安装部之间的钢质波纹管（60）。 波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。 第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。 第二安装部分包括具有第一耐磨板（78）的第一滑动板（74），具有第二耐磨板（80）的第二滑动板（76）和用于将真空条件保持在 设置在第一和第二耐磨板之间的可滑动配合表面。

公开(公告)号：US08563407B2

公开(公告)日：2013-10-22

申请号：US12717647

申请日：2010-03-04

申请人： Richard J. Hertel ,  Ernest E. Allen, Jr. ,  Philip J. McGrail, Jr.

发明人： Richard J. Hertel ,  Ernest E. Allen, Jr. ,  Philip J. McGrail, Jr.

IPC分类号： H01L21/425 ,  G21K1/00

CPC分类号： H01J37/20 ,  C23C14/48 ,  C23C14/505 ,  G11B5/84

摘要： A method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece, treating the first side of the at least one dual sided workpiece, reorienting a portion of the assembly in the process chamber to expose a second side of the at least one dual sided workpiece, the second side opposing the first side, and treating the second side. A processing apparatus including a process chamber defining an enclosed volume and a dual sided workpiece assembly disposed in the enclosed volume is also provided.

摘要翻译： 一种方法包括将至少一个双面工件定位在处理室中的组件上以暴露所述至少一个双面工件的第一侧面，处理所述至少一个双面工件的第一侧，重新定向所述组件的一部分 在所述处理室中暴露所述至少一个双面工件的第二侧，所述第二侧与所述第一侧相对，并且处理所述第二侧。 还提供了一种处理装置，其包括限定封闭容积的处理室和设置在封闭容积中的双面工件组件。