公开(公告)号：US4744709A

公开(公告)日：1988-05-17

申请号：US32204

申请日：1987-03-30

申请人： Richard J. Hertel ,  Leo V. Klos

发明人： Richard J. Hertel ,  Leo V. Klos

IPC分类号： B25J18/02 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  B65G65/00

CPC分类号： H01L21/67288 ,  H01L21/67766 ,  Y10S414/137

摘要： A tactile pick includes a base and a lever attached beneath the base by a pivot. A load sensing device including a strain gauge is located between the base and the portion of the lever on one side of the pivot; the portion of the lever on the other side of the pivot is adapted to receive a semiconductor wafer. Rotation of the lever about the pivot induced by the weight of a wafer causes an actuator to depress a flexible member on which a strain gauge is mounted. The output signal of the strain gauge is processed by a controller to provide an output signal which varies monotonically with the magnitude of the weight placed on the wafer receiving portion of the lever. The pick is employed in connection with the wafer transport system which transfers wafers from a cassette to the pick lever.

公开(公告)号：US09218990B2

公开(公告)日：2015-12-22

申请号：US13268123

申请日：2011-10-07

申请人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel ,  Edward MacIntosh

发明人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel ,  Edward MacIntosh

IPC分类号： H01L21/687 ,  H01L21/67

CPC分类号： H01L21/67 ,  H01L21/68728 ,  H01L21/68764 ,  H01L21/68771

摘要： A substrate carrier includes a carrier plate, a cover plate and a plurality of substrate support slots. The carrier plate has recesses for receiving substrates. A sidewall of each recess includes protrusions for engaging the OD of a substrate. The cover plate is rotatable and has a cam on an undersurface. The cam is enagageable with a lateral slot in each of a plurality of substrate supports of the carrier plate. Rotating the cover plate causes the cam to move the substrate supports, one by one, so a substrate engaging end of the substrate support moves away from an associated substrate recess. A substrate is loaded into the recess, whereupon the cover plate is rotated further so the cam disengages from the lateral slot. The substrate supports are biased to engage the OD of the substrate to lock the substrate within the recess. Other embodiments are described and claimed.

摘要翻译： 衬底载体包括载体板，盖板和多个衬底支撑槽。 承载板具有用于接收基板的凹部。 每个凹部的侧壁包括用于接合基底的OD的突起。 盖板可旋转并且在下表面上具有凸轮。 该凸轮在承载板的多个基板支撑件的每一个中都具有侧向槽。 旋转盖板导致凸轮逐个移动基板支撑件，使得基板支撑件的基板接合端远离相关联的基板凹部移动。 将衬底装入凹部中，于是盖板进一步旋转，使得凸轮与侧向槽脱离。 衬底支撑件被偏置以接合衬底的OD以将衬底锁定在凹部内。 描述和要求保护其他实施例。

公开(公告)号：US20130089403A1

公开(公告)日：2013-04-11

申请号：US13268123

申请日：2011-10-07

申请人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel ,  Edward MacIntosh

发明人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel ,  Edward MacIntosh

IPC分类号： B65G65/00 ,  B65D51/04

CPC分类号： H01L21/67 ,  H01L21/68728 ,  H01L21/68764 ,  H01L21/68771

摘要： A substrate carrier includes a carrier plate, a cover plate and a plurality of substrate support slots. The carrier plate has recesses for receiving substrates. A sidewall of each recess includes protrusions for engaging the OD of a substrate. The cover plate is rotatable-and has a cam on an undersurface. The cam is enagageable with a lateral slot in each of a plurality of substrate supports of the carrier plate. Rotating the cover plate causes the cam to move the substrate supports, one by one, so a substrate engaging end of the substrate support moves away from an associated substrate recess. A substrate is loaded into the recess, whereupon the cover plate is rotated further so the cam disengages from the lateral slot. The substrate supports are biased to engage the OD of the substrate to lock the substrate within the recess. Other embodiments are described and claimed.

摘要翻译： 衬底载体包括载体板，盖板和多个衬底支撑槽。 承载板具有用于接收基板的凹部。 每个凹部的侧壁包括用于接合基底的OD的突起。 盖板是可旋转的，并且在下表面上具有凸轮。 该凸轮在承载板的多个基板支撑件的每一个中都具有侧向槽。 旋转盖板导致凸轮逐个移动基板支撑件，使得基板支撑件的基板接合端远离相关联的基板凹部移动。 将衬底装入凹部中，于是盖板进一步旋转，使得凸轮与侧向槽脱离。 衬底支撑件被偏置以接合衬底的OD以将衬底锁定在凹部内。 描述和要求保护其他实施例。

公开(公告)号：US20130088028A1

公开(公告)日：2013-04-11

申请号：US13268129

申请日：2011-10-07

申请人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel ,  Richard Muka

发明人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel ,  Richard Muka

IPC分类号： B25J15/00

CPC分类号： H01L21/67766 ,  H01L21/67778 ,  H01L21/67781

摘要： A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.

摘要翻译： 公开了用于从盒中去除水平取向的基板的系统和方法。 基板升降器具有用于接合基板的接合端和用于接合调节组件的调节端。 接合端包括具有第一和第二弓形侧壁的凹部，所述第一和第二弧形侧壁被配置为接合基板的外径，以及定位在第一和第二弧形侧壁之间的圆形突起。 圆形突起允许基板横向移动到预定量，并防止基板横向移动超过预定量。 描述和要求保护其他实施例。

公开(公告)号：US5350427A

公开(公告)日：1994-09-27

申请号：US76509

申请日：1993-06-14

申请人： Avrum Freytsis ,  Richard J. Hertel

发明人： Avrum Freytsis ,  Richard J. Hertel

IPC分类号： H01L21/683 ,  H01L21/265 ,  H01L21/687 ,  B05C13/00 ,  B05C11/02

CPC分类号： H01L21/68721 ,  H01L21/68742 ,  Y10T279/247 ,  Y10T29/41

摘要： An apparatus for releasably holding a workpiece in semiconductor process systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of the platen for clamping the wafer against the fence of the supporting means and pusher means mounted on wafer lift means for engagement with the lever mechanism for locking and unlocking the device, and sensing any misclamp of the workpiece.

摘要翻译： 一种用于可释放地将工件保持在诸如间歇离子注入机的半导体工艺系统中的装置，其包括安装在压板的背面上的连杆机构，用于将晶片夹紧在支撑装置的挡板上，并且安装在晶片升降装置上的推动装置用于接合 具有用于锁定和解锁设备的杠杆机构，并感测工件的任何错误的夹紧。

公开(公告)号：US4527846A

公开(公告)日：1985-07-09

申请号：US372506

申请日：1982-04-28

申请人： Richard J. Hertel

发明人： Richard J. Hertel

IPC分类号： H01J29/46 ,  H01J29/58

CPC分类号： H01J29/46

摘要： The zoom focus and deflection assembly for an image-to-electron beam converting electron discharge device comprises a magnetic deflection yoke and a magnetic electron beam focusing coil having N sections each having its own adjustable current source such that at least the opposite end ones of the N sections have the magnitude of current therethrough changed simultaneously in the opposite direction, where N is an integer greater than one.

摘要翻译： 用于图像到电子束转换电子放电装置的变焦焦点和偏转组件包括磁偏转线圈和具有N个部分的磁性电子束聚焦线圈，每个部分各自具有其可调节的电流源，使得至少相反的一个 N个部分的电流大小在相反方向同时改变，其中N是大于1的整数。

公开(公告)号：US09070730B2

公开(公告)日：2015-06-30

申请号：US13268109

申请日：2011-10-07

申请人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel

发明人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel

IPC分类号： H01L21/677 ,  H01L21/687

CPC分类号： H01L21/68707 ,  H01L21/67751 ,  Y10S414/138 ,  Y10S414/141

摘要： A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.

摘要翻译： 公开了用于从盒中去除垂直取向的基板的系统和方法。 提升器包括用于保持基板的升降器切口和稳定器切口。 升降器切口沿着基板ID接合和提升基板，而稳定器凹口捕获基板OD，以防止在提升期间基板的横向移动。 在使用中，盒子倾斜以将所有基板偏压到一侧，并确保间隔一致。 提升器向上移动到盒中，直到凹口相邻，但在底部下方的基底的ID和OD。 升降机横向移动，将切口定位在ID和OD的正下方。 升降机的向上运动导致升降器切口沿着ID抬起基板。 升降器继续向上与基板直到基板清除磁带的顶部。 描述和要求保护其他实施例。

公开(公告)号：US08550520B2

公开(公告)日：2013-10-08

申请号：US13268139

申请日：2011-10-07

申请人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel

发明人： John Robert Fairhurst ,  Jeffrey E. Krampert ,  Richard J. Hertel

IPC分类号： B66C1/00 ,  B66C1/54

CPC分类号： H01L21/68707 ,  H01L21/68764 ,  H01L21/68771

摘要： A device is disclosed for manipulating a substrate having an inside diameter (ID). The device includes a handle, a trigger that slides within the handle, an alignment shaft and a plurality of substrate supports having distal ends. A plurality of substrate support actuators are connected to the trigger. The trigger can move the plurality of substrate supports between a substrate engaging position and a substrate releasing position through selective engagement of the plurality of substrate supports by the plurality of substrate support actuators. In the substrate engaging position the distal ends of the substrate supports move radially outward to engage the ID of the substrate, enabling the device to hold the substrate without touching the substrate faces. Other embodiments are described and claimed.

摘要翻译： 公开了一种用于操纵具有内径（ID）的基板的装置。 该装置包括手柄，在手柄内滑动的触发器，对准轴和具有远端的多个基板支撑件。 多个基板支撑致动器连接到触发器。 触发器可以通过由多个基板支撑致动器选择性地接合多个基板支撑件而在基板接合位置和基板释放位置之间移动多个基板支撑件。 在衬底接合位置，衬底支撑件的远端径向向外移动以接合衬底的ID，使得器件能够保持衬底而不接触衬底面。 描述和要求保护其他实施例。

公开(公告)号：US20130240759A1

公开(公告)日：2013-09-19

申请号：US13424286

申请日：2012-03-19

申请人： Jeffrey E. Krampert ,  Richard J. Hertel ,  John Robert Fairhurst

发明人： Jeffrey E. Krampert ,  Richard J. Hertel ,  John Robert Fairhurst

IPC分类号： A61N5/06 ,  F28F9/00 ,  H01L21/687 ,  F25D17/02

CPC分类号： H01J37/20 ,  C23C14/221 ,  C23C14/50 ,  C23C14/541 ,  H01J37/3171 ,  H01J2237/2001 ,  H01L21/67109 ,  H01L21/68728 ,  H01L21/68792 ,  Y10T29/49998

摘要： A system and method are disclosed for holding and cooling substrates during processing. A substrate clamp has an engagement portion for engaging a substrate about the inside diameter as well as a portion of the substrate surface immediately adjacent to the inside diameter. The clamp has a retracted position which enables the engagement portion to fit through the substrate ID, and an expanded position which enables the engagement portion to engage the substrate ID and the substrate surface immediately adjacent to the inside diameter. The clamp can include a conformal coating to enhance engagement between the substrate and the engagement portion. The clamp can also include an energy absorbing coating on one or more surfaces to maximize the absorption of radiative energy emitted from the substrate. Other embodiments are described and claimed.

摘要翻译： 公开了用于在加工期间保持和冷却基板的系统和方法。 衬底夹具具有用于接合围绕内径的衬底的接合部分以及紧邻内径的衬底表面的一部分。 夹具具有缩回位置，其使得接合部分能够穿过基板ID，并且扩展位置使得接合部分能够接合基板ID和紧邻内径的基板表面。 夹具可以包括保形涂层，以增强基底和接合部分之间的接合。 夹具还可以包括在一个或多个表面上的能量吸收涂层，以最大化从衬底发射的辐射能的吸收。 描述和要求保护其他实施例。

公开(公告)号：US20100260943A1

公开(公告)日：2010-10-14

申请号：US12717647

申请日：2010-03-04

申请人： Richard J. HERTEL ,  Ernest E. Allen ,  Philip J. McGrail, JR.

发明人： Richard J. HERTEL ,  Ernest E. Allen ,  Philip J. McGrail, JR.

IPC分类号： C23C14/48

CPC分类号： H01J37/20 ,  C23C14/48 ,  C23C14/505 ,  G11B5/84

摘要： A method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece, treating the first side of the at least one dual sided workpiece, reorienting a portion of the assembly in the process chamber to expose a second side of the at least one dual sided workpiece, the second side opposing the first side, and treating the second side. A processing apparatus including a process chamber defining an enclosed volume and a dual sided workpiece assembly disposed in the enclosed volume is also provided.

摘要翻译： 一种方法包括将至少一个双面工件定位在处理室中的组件上以暴露所述至少一个双面工件的第一侧面，处理所述至少一个双面工件的第一侧，重新定向所述组件的一部分 在所述处理室中暴露所述至少一个双面工件的第二侧，所述第二侧与所述第一侧相对，并且处理所述第二侧。 还提供了一种处理装置，其包括限定封闭容积的处理室和设置在封闭容积中的双面工件组件。