公开(公告)号：US20230238204A1

公开(公告)日：2023-07-27

申请号：US17923259

申请日：2021-04-29

Applicant: Excillum AB

Inventor： Björn HANSSON ,  Julius HÅLLSTEDT ,  Tomi TUOHIMAA ,  Ulf LUNDSTRÖM ,  Daniel NILSSON

IPC: H01J35/14 ,  H01J35/30 ,  G01N23/04

CPC classification number: H01J35/153 ,  H01J35/30 ,  G01N23/04 ,  G01N2223/204

Abstract: An X-ray imaging system, including a target; an electron beam source configured to provide an electron beam for interaction with the target to generate X-ray radiation; electron optics configured to alternately direct the electron beam to at least a first and a second location on the target; an X-ray detector array configured to receive X-ray radiation generated at the first and second locations on the target; a sample position region for receiving a sample to be exposed to generated X-ray radiation, the sample position region being located in a region where X-ray radiation generated at the first location overlaps with X-ray radiation generated at the second location; and a processing unit coupled to the X-ray detector array, the processing unit being configured to create an image of a sample, positioned in the sample position region, based on the X-ray radiation originating from the first location and from the second location.