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公开(公告)号：US10818468B1
公开(公告)日：2020-10-27
申请号：US16081585
申请日：2017-03-01
Applicant: Excillum AB
Inventor： Björn Hansson , Tomi Tuohimaa , Göran Johansson
Abstract: An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a target generator, an electron source and a mixing tool. The target generator is adapted to form a liquid jet propagating through an interaction region, whereas the electron source is adapted to provide an electron beam directed towards the interaction region such that the electron beam interacts with the liquid jet to generate X-ray radiation. The mixing tool is adapted to induce mixing of the liquid jet at a distance downstream of the interaction region such that a maximum surface temperature of the liquid jet is below a threshold temperature. By controlling the maximum surface temperature, vaporisation, and thus the amount of contaminations originating from the jet, may be reduced.
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