公开(公告)号：US20180323032A1

公开(公告)日：2018-11-08

申请号：US15585059

申请日：2017-05-02

申请人： FEI Comany

发明人： PETR STRELEC ,  Ondrej Shanel

IPC分类号： H01J35/06 ,  G01N23/04 ,  H01J35/30

摘要： A method, target, and apparatus are disclosed for investigating a specimen using X-ray tomography. The specimen in mounted on a specimen holder. An X-ray target has a substrate of relatively low-atomic-number material carrying an array of mutually isolated nuggets of a relatively high-atomic number material. X-rays are generated by irradiating a single nugget in the target with a charged particle beam, which then illuminates the specimen along a first line of sight through the specimen. A flux of X-rays transmitted through the specimen is detected to form a first image. The illumination process is repeated for a series of different lines of sight through the specimen, to produce a series of images. A mathematical reconstruction on the series of images is then performed to produce a tomogram of at least part of the specimen.