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公开(公告)号：US20210005420A1
公开(公告)日：2021-01-07
申请号：US16460749
申请日：2019-07-02
申请人： FEI Company
IPC分类号： H01J37/295 , H01J37/244 , H01J37/26 , G01N23/203 , G01N23/20058
摘要： Various methods and systems are provided for acquiring electron backscatter diffraction patterns. In one example, a first scan is performed by directing a charged particle beam towards multiple impact points within a ROI and detecting particles scattered from the multiple impact points. A signal quality of each impact point of the multiple impact points is calculated based on the detected particles. A signal quality of the ROI is calculated based on the signal quality of each impact point. Responsive to the signal quality of the ROI lower than a threshold signal quality, a second scan of the ROI is performed. A structural image of the sample may be formed based on detected particles from both the first scan and the second scan.
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公开(公告)号：US11114275B2
公开(公告)日：2021-09-07
申请号：US16460749
申请日：2019-07-02
申请人： FEI Company
IPC分类号： H01J37/00 , H01J37/295 , G01N23/20058 , G01N23/203 , H01J37/244 , H01J37/26
摘要： Various methods and systems are provided for acquiring electron backscatter diffraction patterns. In one example, a first scan is performed by directing a charged particle beam towards multiple impact points within a ROI and detecting particles scattered from the multiple impact points. A signal quality of each impact point of the multiple impact points is calculated based on the detected particles. A signal quality of the ROI is calculated based on the signal quality of each impact point. Responsive to the signal quality of the ROI lower than a threshold signal quality, a second scan of the ROI is performed. A structural image of the sample may be formed based on detected particles from both the first scan and the second scan.
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