公开(公告)号：US10607811B1

公开(公告)日：2020-03-31

申请号：US16289292

申请日：2019-02-28

申请人： FEI Company

发明人： Ali Mohammadi-Gheidari ,  Ivan Lazić ,  Eric Bosch ,  Gerard van Veen

IPC分类号： H01J37/00 ,  H01J37/28 ,  H01J37/244 ,  H01J37/09 ,  H01J37/147

摘要： Techniques for multi-beam scanning transmission charged particle microscopy are disclosed herein. An example apparatus at least includes a charged particle beam column to produce a plurality of charged particle beams and irradiate a specimen with each of the plurality of charged particle beams, and an imaging system to collect charged particles of each of the charged particle beams of the plurality of charged particle beams that traverse the specimen during said irradiation, and to direct each charged particle beam of the plurality of the charged particle beams after traversing the sample onto a detector, where each charged particle beam includes a barycenter, and where the detector is disposed in an intermediate location between a back focal plane and an imaging plane of the imaging system.

公开(公告)号：US20230005705A1

公开(公告)日：2023-01-05

申请号：US17364621

申请日：2021-06-30

申请人： FEI Company

发明人： Bart Jozef Janssen ,  Gerard van Veen ,  Erik Kieft

IPC分类号： H01J37/244 ,  H01J37/04

摘要： Electron beam modulation in response to optical pump pulses applied to a sample is measured using SPAD elements. Individual detection events are used to form histograms of numbers of events in time bins associated with pump pulse timing. The histograms can be produced at a SPAD array, simplifying data transfer. In some examples, two SPAD arrays are stacked and a coincidence circuit discriminates signal events from noise events by determining corresponding events are detected withing a predetermined time window.

公开(公告)号：US11551906B1

公开(公告)日：2023-01-10

申请号：US17364621

申请日：2021-06-30

申请人： FEI Company

发明人： Bart Jozef Janssen ,  Gerard van Veen ,  Erik Kieft

IPC分类号： H01J37/244 ,  H01J37/04 ,  H01J37/26

摘要： Electron beam modulation in response to optical pump pulses applied to a sample is measured using SPAD elements. Individual detection events are used to form histograms of numbers of events in time bins associated with pump pulse timing. The histograms can be produced at a SPAD array, simplifying data transfer. In some examples, two SPAD arrays are stacked and a coincidence circuit discriminates signal events from noise events by determining corresponding events are detected within a predetermined time window.

公开(公告)号：US20220208510A1

公开(公告)日：2022-06-30

申请号：US17564154

申请日：2021-12-28

申请人： FEI Company

发明人： Bart Jozef Janssen ,  Gerard van Veen

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/147

摘要： An apparatus includes an electron source coupled to provide an electron beam, a beam deflector arranged to provide a pulsed electron beam from the electron beam, a detector arranged to receive the pulsed electron beam after transmitting through a sample, and a controller coupled to control at least the beam deflector and the detector, the controller coupled to or including code that, when executed by the controller, causes the apparatus to establish the pulsed electron beam with pulse characteristics based on control of at least the beam deflector, wherein an illumination window is formed based on the pulse characteristics, the illumination window being a time frame when the sample is illuminated with a pulse of the pulsed electron beam, and to form a detection window for the detector and synchronize the detection window in relation to the illumination window, wherein detection events occurring in the detection window form the basis of an image, wherein the detection window determines a time frame when the detector converts the pulse of the pulsed electron beam transmitted through the sample to an electron induced signal.