公开(公告)号：US10607811B1

公开(公告)日：2020-03-31

申请号：US16289292

申请日：2019-02-28

申请人： FEI Company

发明人： Ali Mohammadi-Gheidari ,  Ivan Lazić ,  Eric Bosch ,  Gerard van Veen

IPC分类号： H01J37/00 ,  H01J37/28 ,  H01J37/244 ,  H01J37/09 ,  H01J37/147

摘要： Techniques for multi-beam scanning transmission charged particle microscopy are disclosed herein. An example apparatus at least includes a charged particle beam column to produce a plurality of charged particle beams and irradiate a specimen with each of the plurality of charged particle beams, and an imaging system to collect charged particles of each of the charged particle beams of the plurality of charged particle beams that traverse the specimen during said irradiation, and to direct each charged particle beam of the plurality of the charged particle beams after traversing the sample onto a detector, where each charged particle beam includes a barycenter, and where the detector is disposed in an intermediate location between a back focal plane and an imaging plane of the imaging system.

公开(公告)号：US20230352269A1

公开(公告)日：2023-11-02

申请号：US18303106

申请日：2023-04-19

申请人： FEI COMPANY

发明人： Eric Bosch ,  Ivan Lazic

IPC分类号： H01J37/28 ,  H01J37/244 ,  G06T7/571

CPC分类号： H01J37/28 ,  H01J37/244 ,  G06T7/571 ,  H01J2237/223 ,  G06T2207/10061 ,  G06T2207/20056

摘要： A computer-implemented method of processing image data according to the present disclosure comprises: receiving the image data, wherein the image data is scanning transmission charged-particle microscope (STCPM) image data representing a STCPM scan obtained at a first focus depth; and processing a system of equations expressing the image data as a sum of contributions from a plurality of slices of the sample at a plurality of focus depths, wherein each equation of the system of equations relates at least a portion of the image data to: at least one of a plurality of contrast transfer functions of the STCPM, each contrast transfer function of the STCPM being determined at a different respective focus depth; and at least one set of unknown objects of the STCPM, each unknown object in a set being at a different respective focus depth. The step of processing comprises solving the system of equations to obtain at least one of the plurality of unknown objects of the STCPM.