公开(公告)号：US20180217059A1

公开(公告)日：2018-08-02

申请号：US15749043

申请日：2016-07-22

申请人： FEI Company

发明人： Nicholas C. BARBI ,  Richard B. MOTT ,  Owen HEALY

IPC分类号： G01N21/64 ,  H01J37/244 ,  H01J37/28 ,  G01J1/42

CPC分类号： G01N21/64 ,  G01J1/42 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2445 ,  H01J2237/24465 ,  H01J2237/24475

摘要： A detector for a charged particle beam device includes a substrate, a number of first sensor devices provided on the substrate, wherein the first sensor devices are structured to be sensitive to and generate a first signal in response to electrons ejected by a specimen, and a number of second sensor devices provided on the substrate, wherein the second sensor devices are structured to be sensitive to and generate a second signal in response to photons emitted by the specimen. Also, a photon detector wherein each of the photon sensor devices is structured to be sensitive to and generate a signal in response to photons emitted by the specimen, and wherein each of the photon sensor devices comprises a MultiPixel Photon Counter device. Further, a method of imaging a specimen using a charged particle beam device uses beam blanking and determination of estimated a decay time constants.