公开(公告)号：US20180217059A1

公开(公告)日：2018-08-02

申请号：US15749043

申请日：2016-07-22

申请人： FEI Company

发明人： Nicholas C. BARBI ,  Richard B. MOTT ,  Owen HEALY

IPC分类号： G01N21/64 ,  H01J37/244 ,  H01J37/28 ,  G01J1/42

CPC分类号： G01N21/64 ,  G01J1/42 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2445 ,  H01J2237/24465 ,  H01J2237/24475

摘要： A detector for a charged particle beam device includes a substrate, a number of first sensor devices provided on the substrate, wherein the first sensor devices are structured to be sensitive to and generate a first signal in response to electrons ejected by a specimen, and a number of second sensor devices provided on the substrate, wherein the second sensor devices are structured to be sensitive to and generate a second signal in response to photons emitted by the specimen. Also, a photon detector wherein each of the photon sensor devices is structured to be sensitive to and generate a signal in response to photons emitted by the specimen, and wherein each of the photon sensor devices comprises a MultiPixel Photon Counter device. Further, a method of imaging a specimen using a charged particle beam device uses beam blanking and determination of estimated a decay time constants.

公开(公告)号：US09833214B2

公开(公告)日：2017-12-05

申请号：US14620208

申请日：2015-02-12

申请人： FUJIFILM CORPORATION

发明人： Ryou Imamura

IPC分类号： H01L27/146 ,  H01L27/148 ,  A61B6/00 ,  H01J37/22 ,  G01T1/02 ,  G06T7/00 ,  G01T7/00 ,  H01L27/144 ,  H04N5/32

CPC分类号： A61B6/586 ,  A61B6/4283 ,  A61B6/542 ,  A61B6/58 ,  A61B2560/0276 ,  A61B2562/046 ,  G01T1/026 ,  G01T7/005 ,  G06T7/0012 ,  G06T2207/20221 ,  H01J2237/24465 ,  H01J2237/24507 ,  H01J2237/24592 ,  H01L27/1446 ,  H01L27/14605 ,  H01L27/14607 ,  H01L27/14806 ,  H01L27/14812 ,  H04N5/32

摘要： A radiographic image capturing device includes: plural radiation dose detection pixels that respectively output signal values according to a dose of irradiated radiation; a determination unit that determines a presence or absence of defects, block-by-block, based on signal values of radiation dose detection pixels included in each of plural blocks, which are arranged such that the respective blocks include at least a portion of the plural radiation dose detection pixels; a block rearrangement unit that performs block rearrangement to change the arrangement of the plural blocks according to a determination result of the determination unit; and a detection unit that detects a dose of irradiated radiation based on signal values of each arranged block or of each rearranged block.

公开(公告)号：US20170154756A1

公开(公告)日：2017-06-01

申请号：US15365145

申请日：2016-11-30

申请人： Hermes Microvision Inc.

发明人： Weiming Ren ,  Xuedong Liu ,  Xuerang Hu ,  Zhongwei Chen

IPC分类号： H01J37/28 ,  H01J37/14 ,  H01J37/153 ,  H01J37/244 ,  H01J37/20

CPC分类号： H01J37/28 ,  H01J37/14 ,  H01J37/141 ,  H01J37/153 ,  H01J37/20 ,  H01J37/244 ,  H01J37/292 ,  H01J2237/0453 ,  H01J2237/1532 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2817

摘要： A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.

公开(公告)号：US20170084422A1

公开(公告)日：2017-03-23

申请号：US15245911

申请日：2016-08-24

申请人： KLA-Tencor Corporation

发明人： Doug K. Masnaghetti ,  Mark A. McCord ,  Richard R. Simmons ,  Rainer Knippelmeyer

IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/06 ,  H01J37/29

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/2804

摘要： Multi-beam scanning electron microscope (SEM) inspection systems with dark field imaging capabilities are disclosed. An SEM inspection system may include an electron source and at least one optical device. The at least one optical device may be configured to produce a plurality of primary beamlets utilizing electrons provided by the electron source and deliver the plurality of primary beamlets toward a target. The apparatus may also include an array of detectors configured to receive a plurality of image beamlets emitted by the target in response to the plurality of primary beamlets and produce at least one dark field image of the target.

公开(公告)号：US20150243474A1

公开(公告)日：2015-08-27

申请号：US14629387

申请日：2015-02-23

申请人： FEI Company

发明人： Ivan Lazic ,  Eric Gerardus Theodoor Bosch ,  Faysal Boughorbel ,  Bart Buijsse ,  Kasim Sader ,  Sorin Lazar

IPC分类号： H01J37/244 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802

摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.

摘要翻译： 在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

公开(公告)号：US20150153464A1

公开(公告)日：2015-06-04

申请号：US14620208

申请日：2015-02-12

申请人： FUJIFILM CORPORATION

发明人： Ryou IMAMURA

IPC分类号： G01T7/00 ,  G01T1/20

CPC分类号： A61B6/586 ,  A61B6/4283 ,  A61B6/542 ,  A61B6/58 ,  A61B2560/0276 ,  A61B2562/046 ,  G01T1/026 ,  G01T7/005 ,  G06T7/0012 ,  G06T2207/20221 ,  H01J2237/24465 ,  H01J2237/24507 ,  H01J2237/24592 ,  H01L27/1446 ,  H01L27/14605 ,  H01L27/14607 ,  H01L27/14806 ,  H01L27/14812 ,  H04N5/32

摘要： A radiographic image capturing device includes: plural radiation dose detection pixels that respectively output signal values according to a dose of irradiated radiation; a determination unit that determines a presence or absence of defects, block-by-block, based on signal values of radiation dose detection pixels included in each of plural blocks, which are arranged such that the respective blocks include at least a portion of the plural radiation dose detection pixels; a block rearrangement unit that performs block rearrangement to change the arrangement of the plural blocks according to a determination result of the determination unit; and a detection unit that detects a dose of irradiated radiation based on signal values of each arranged block or of each rearranged block.

摘要翻译： 射线照相图像拍摄装置包括：多个辐射剂量检测像素，其分别根据照射的辐射的剂量输出信号值; 确定单元，其基于包括在多个块中的每一个中的辐射剂量检测像素的信号值逐块地确定缺陷的存在或不存在，其被布置为使得各个块包括多个块中的至少一部分 辐射剂量检测像素; 块重排单元，根据确定单元的确定结果执行块重排以改变多个块的排列; 以及检测单元，其基于每个排列的块或每个重新排列的块的信号值来检测照射的辐射的剂量。

公开(公告)号：US08946627B2

公开(公告)日：2015-02-03

申请号：US14081981

申请日：2013-11-15

申请人： Applied Materials Israel, Ltd.

发明人： Ishai Schwarzband ,  Yakov Weinberg

IPC分类号： H01J37/28 ,  G01N23/00 ,  G01D18/00 ,  H01J37/244 ,  G01B21/30 ,  H01J37/26 ,  G01N23/225

CPC分类号： G01B21/30 ,  G01D18/008 ,  G01N23/2251 ,  G01N2223/6116 ,  H01J37/24 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/22 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/2814 ,  H01J2237/2826

摘要： A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.

摘要翻译： 一种方法包括用一次电子束照射由多种类型的材料制成的样品的表面。 使用位于相对于样品的各个不同位置的多个检测器来检测从照射样品发射的发射电子，以便产生相应的检测器输出。 计算校正因子以补偿材料类型中发射的电子产量的变化，通过针对每种材料类型识别由材料类型组成的表面上的一个或多个水平区域，以及计算校准因子 基于所识别的水平区域中的至少一个检测器输出的材料类型。 校准因子应用于检测器输出。 基于应用校准因子的检测器输出计算表面的三维地形模型。

公开(公告)号：US20140175277A1

公开(公告)日：2014-06-26

申请号：US13734180

申请日：2013-01-04

申请人： Stefan Lanio

发明人： Stefan Lanio ,  Jüergen Frosien ,  Gerald Schoenecker ,  Dieter Winkler

IPC分类号： H01J37/26

CPC分类号： H01J37/244 ,  H01J37/147 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2812 ,  H01J2237/2814

摘要： A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.

摘要翻译： 描述了带电粒子束装置的二次带电粒子检测系统。 检测系统包括用于分离初级束的分束器和在冲击样品上形成的次级束; 用于偏转次光束的光束弯曲机; 用于聚焦二次束的聚焦透镜; 用于检测次级束粒子的检测元件和三个偏转元件，其中至少第一偏转器设置在光束弯曲器和聚焦透镜之间，至少第二偏转器设置在聚焦透镜和检测元件之间，至少 在分束器和检测元件之间提供第三偏转器。

公开(公告)号：US08629395B2

公开(公告)日：2014-01-14

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/22

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US08378299B2

公开(公告)日：2013-02-19

申请号：US13045068

申请日：2011-03-10

申请人： Jürgen Frosien

发明人： Jürgen Frosien

IPC分类号： G01B15/00

CPC分类号： H01J37/147 ,  H01J37/1471 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/1514 ,  H01J2237/153 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A column for a charged particle beam device is described. The column includes a charged particle emitter for emitting a primary charged particle beam as one source of the primary charged particle beam; a biprism adapted for acting on the primary charged particle beam so that two virtual sources are generated; and a charged particle beam optics adapted to focus the charged particle beam simultaneously on two positions of a specimen corresponding to images of the two virtual sources.

摘要翻译： 描述带电粒子束装置的柱。 该柱包括用于发射初级带电粒子束作为初级带电粒子束的一个源的带电粒子发射器; 适于作用于初级带电粒子束的双棱镜，从而产生两个虚拟源; 以及带电粒子束光学器件，其适于将带电粒子束同时聚焦在对应于两个虚拟源的图像的样本的两个位置上。