公开(公告)号：US20210088770A1

公开(公告)日：2021-03-25

申请号：US16580957

申请日：2019-09-24

Applicant: FEI Company

Inventor： John Flanagan ,  Brad Larson ,  Thomas Miller

IPC: G02B21/36 ,  G06T3/00 ,  G06T7/33 ,  G06N3/08 ,  G02B21/00

Abstract: Methods and systems for implementing artificial intelligence to determine the pose of a sample within a microscope system and aligning said sample are disclosed. An example method includes receiving an image of the sample in the microscope apparatus, accessing a template associated with the sample. The template describes a plurality of template key points of the template version of the sample. A plurality of key points on the sample are then determined, where each of the key points on the sample corresponds to a corresponding template key point of a sample template, and the key points are subsequently used to determine a transformation between the sample as depicted in the image and the template version of the sample as described in the template. The transformation can then be used to automate the alignment of the sample within the microscope.

公开(公告)号：US12293525B2

公开(公告)日：2025-05-06

申请号：US17965217

申请日：2022-10-13

Applicant: FEI Company

Inventor： John Flanagan ,  Brad Larson ,  Thomas Miller

IPC: G06T7/12 ,  G06F18/243 ,  G06N3/045 ,  G06N3/08 ,  G06N20/20 ,  G06T7/00 ,  G06T7/10 ,  G06T7/11 ,  G06T7/13 ,  G06T7/174 ,  G06T7/30 ,  G06V10/26 ,  G06V10/44 ,  G06V10/764 ,  G06V10/82

Abstract: Methods and systems for implementing artificial intelligence enabled metrology are disclosed. An example method includes segmenting a first image of structure into one or more classes to form an at least partially segmented image, associating at least one class of the at least partially segmented image with a second image, and performing metrology on the second image based on the association with at least one class of the at least partially segmented image.