公开(公告)号：US20250006453A1

公开(公告)日：2025-01-02

申请号：US18342643

申请日：2023-06-27

Applicant: FEI Company

Inventor： Jan Stopka ,  Tomáš Radlicka ,  Martin Oral

IPC: H01J37/14 ,  H01J37/20 ,  H01J37/21 ,  H01J37/28

Abstract: Magnetic lenses, charged particle microscope systems including the same, and associated methods. In an example, a magnetic lens is configured to direct a charged particle beam to a sample location and comprises a plurality of pole pieces and at least two independent coils. The magnetic lens operates as an objective lens with variable main objective plane without immersing a sample in a magnetic field. The variable main objective plane permits selective adjustment of a magnification of the charged particle beam at the focal plane without immersing the sample location in the magnetic fields produced by coils of the magnetic lens. In an example, a charged particle microscope system comprises a charged particle source, a sample holder, and a magnetic objective lens. In an example, a method comprises positioning a sample relative to a magnetic lens and operating the magnetic lens to focus a charged particle beam to a focus location.