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公开(公告)号：US12216029B2
公开(公告)日：2025-02-04
申请号：US17826782
申请日：2022-05-27
Applicant: FEI Company
Inventor： Libor Novak , Tomas Kazda
IPC: G01N1/10
Abstract: The present invention relates to a method for preparing and/or processing a sample. The sample comprises at least one fluid, and the method comprises directing a charged particle beam onto the at least one fluid and causing the at least one fluid to flow in response to the charged particle beam being directed on to it. The present invention also relates to a system and a computer program product used to carry out the method.
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