公开(公告)号：US20150002848A1

公开(公告)日：2015-01-01

申请号：US14372093

申请日：2013-01-15

Applicant: FEMTOLASERS PRODUCTIONS GMBH

Inventor： Gabriel-Florin Tempea

IPC: G01J3/45 ,  G01N21/25

CPC classification number: G01J3/45 ,  E01H5/045 ,  G01J3/4531 ,  G01J2003/283 ,  G01J2003/451 ,  G01J2003/4538 ,  G01M11/005 ,  G01N21/25 ,  G01N21/45 ,  G01N2021/4126 ,  G01N2201/126 ,  G02B1/115 ,  G02B5/0825

Abstract: Method and device for optical inspection of a sample using spectral interferometry, wherein a beam (2″) emitted by a radiation source (1) is directed onto the sample (5) and a reference beam (2′) is directed onto a reference sample (4), and the spectral interference of both beams after being reflected on the samples or after passing the samples is recorded by means of a spectrograph (6); the interferogram I(ω) thus obtained is numerically derived with respect to the angular frequency ω. For the function I′(ω) thus obtained the zeros ωi are calculated numerically as solutions to the equation I′(ω)=0 and the frequency-dependent group delay τ(ω) is then calculated from the zeros ωi according to the equation τ(ωn)=π/(ωi+1−ωi), wherein i=1, 2 . . . and ωn=(ωi+1+ωi)2.

Abstract translation: 用于使用光谱干涉测量法对样品进行光学检查的方法和装置，其中由辐射源（1）发射的光束（2“）被引导到样品（5）上，并且参考光束（2'）被引导到参考样品 （4），并且两个光束在样品上反射之后或在通过样品之后的光谱干涉通过光谱仪（6）记录; 这样获得的干涉图I（ω）相对于角频率ω被数值地导出。 对于由此获得的函数I'（ω），零数值被计算为等式I'（ω）= 0的解，并且然后根据等式从零的ωi计算频率相关组延迟τ（ω） τ（ωn）=＆pgr; /（ωi+ 1-ωi），其中i = 1,2。 。 。 和ωn=（ωi+ 1 +ωi）2。