公开(公告)号：US20130206966A1

公开(公告)日：2013-08-15

申请号：US13851842

申请日：2013-03-27

Applicant: FUJIFILM CORPORATION

Inventor： Tetsuro MITSUI ,  Yuki KURAMOTO

IPC: H01L31/18 ,  H01L27/146

CPC classification number: H01L31/18 ,  H01L27/146 ,  H01L27/307

Abstract: Also provided is a method for manufacturing a photoelectric conversion device including: a first process where a plurality of pixel electrodes 104 are formed on a dielectric layer 102; a second process where a light receiving layer 107 that includes an organic material is formed on the plurality of pixel electrodes 104; and a third process where a counter electrode 108 is formed on the light receiving layer 107, in which the first process comprises: a film forming process of a pixel electrode material on the dielectric layer 102; a patterning process of the film of the pixel electrode material; and a heating process for heating the substrate at 270° C. after the patterning process.

Abstract translation: 还提供了一种用于制造光电转换装置的方法，包括：在电介质层102上形成多个像素电极104的第一工序; 在多个像素电极104上形成有包含有机材料的受光层107的第二工序; 以及第三工序，其中对电极108形成在光接收层107上，其中第一工艺包括：电介质层102上的像素电极材料的成膜工艺; 像素电极材料的膜的图案化工艺; 以及在图案化处理之后在270℃下加热基板的加热工艺。