公开(公告)号：US11914407B2

公开(公告)日：2024-02-27

申请号：US17605948

申请日：2020-04-16

申请人： FUJIKIN INCORPORATED

发明人： Kaoru Hirata ,  Keisuke Ideguchi ,  Shinya Ogawa ,  Katsuyuki Sugita ,  Masaaki Nagase ,  Kouji Nishino ,  Nobukazu Ikeda ,  Hiroyuki Ito

IPC分类号： G05D7/06 ,  G01L13/06 ,  G01F15/00 ,  G01F1/36 ,  G01L19/08

CPC分类号： G05D7/0635 ,  G01F1/363 ,  G01F15/005 ,  G01L13/06 ,  G01L19/08 ,  Y10T137/7761

摘要： The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.