公开(公告)号：US12007797B2

公开(公告)日：2024-06-11

申请号：US18346434

申请日：2023-07-03

Applicant: FUJIKIN INCORPORATED

Inventor： Katsuyuki Sugita ,  Kouji Nishino ,  Naofumi Yasumoto ,  Kaoru Hirata ,  Shinya Ogawa ,  Keisuke Ideguchi

IPC: G05D7/06 ,  F16K31/00 ,  G01F1/36 ,  G05B15/02

CPC classification number: G05D7/0623 ,  F16K31/004 ,  G05B15/02 ,  G05D7/0635 ,  G01F1/363

Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

公开(公告)号：US11914407B2

公开(公告)日：2024-02-27

申请号：US17605948

申请日：2020-04-16

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru Hirata ,  Keisuke Ideguchi ,  Shinya Ogawa ,  Katsuyuki Sugita ,  Masaaki Nagase ,  Kouji Nishino ,  Nobukazu Ikeda ,  Hiroyuki Ito

IPC: G05D7/06 ,  G01L13/06 ,  G01F15/00 ,  G01F1/36 ,  G01L19/08

CPC classification number: G05D7/0635 ,  G01F1/363 ,  G01F15/005 ,  G01L13/06 ,  G01L19/08 ,  Y10T137/7761

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

公开(公告)号：US20250012654A1

公开(公告)日：2025-01-09

申请号：US18893628

申请日：2024-09-23

Applicant: FUJIKIN INCORPORATED ,  NIDEC COMPONENTS CORPORATION

Inventor： Kaoru Hirata ,  Keisuke Ideguchi ,  Shinya Ogawa ,  Katsuyuki Sugita ,  Masaaki Nagase ,  Kouji Nishino ,  Masaki Fukasawa ,  Yusuke Ishikawa

IPC: G01L13/02 ,  G01L19/00 ,  G01L19/06

Abstract: A pressure sensor that can prevent application of excessive stress on a port and detect fluid differential pressure accurately. A base includes a sensor that detects a pressure difference between a first fluid and a second fluid. A first port is attached to the base and has a first flow path through which the first fluid is introduced. A second port is attached to the base and has a second flow path through which the second fluid is introduced. The outer diameter of the first port is equal to the outer diameter of the second port, and the diameter of the first flow path is smaller than the diameter of the second flow path.

公开(公告)号：US11733721B2

公开(公告)日：2023-08-22

申请号：US16970278

申请日：2019-02-15

Applicant: FUJIKIN INCORPORATED

Inventor： Katsuyuki Sugita ,  Kouji Nishino ,  Naofumi Yasumoto ,  Kaoru Hirata ,  Shinya Ogawa ,  Keisuke Ideguchi

IPC: G05D7/06 ,  F16K31/00 ,  G05B15/02 ,  G01F1/36

CPC classification number: G05D7/0623 ,  F16K31/004 ,  G05B15/02 ,  G05D7/0635 ,  G01F1/363

Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

公开(公告)号：US12174647B2

公开(公告)日：2024-12-24

申请号：US18418644

申请日：2024-01-22

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru Hirata ,  Keisuke Ideguchi ,  Shinya Ogawa ,  Katsuyuki Sugita ,  Masaaki Nagase ,  Kouji Nishino ,  Nobukazu Ikeda ,  Hiroyuki Ito

IPC: G05D7/06 ,  G01F1/36 ,  G01F15/00 ,  G01L13/06 ,  G01L19/08

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

公开(公告)号：US11976748B2

公开(公告)日：2024-05-07

申请号：US17638772

申请日：2020-06-12

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru Hirata ,  Masaaki Nagase ,  Atsushi Hidaka ,  Kazuyuki Morisaki ,  Keisuke Ideguchi ,  Kosuke Sugimoto ,  Masafumi Kitano ,  Kouji Nishino ,  Nobukazu Ikeda

IPC: F16K7/17 ,  C09D127/12 ,  F16K7/14 ,  F16K25/00

CPC classification number: F16K7/17 ,  C09D127/12 ,  F16K7/14 ,  F16K25/005

Abstract: A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).