公开(公告)号：US20220082176A1

公开(公告)日：2022-03-17

申请号：US17425448

申请日：2020-01-23

Applicant: FUJIKIN INCORPORATED

Inventor： Ryutaro TANNO ,  Toshihide YOSHIDA ,  Daihi TSUCHIGUCHI ,  Yuya SUZUKI ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K31/00 ,  F16K31/122 ,  F16K7/17 ,  F16K37/00

Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.

公开(公告)号：US20200161147A1

公开(公告)日：2020-05-21

申请号：US16635002

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Yukio MINAMI ,  Tsutomu SHINOHARA

IPC: H01L21/67 ,  B01J4/00

Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.

公开(公告)号：US20200224776A1

公开(公告)日：2020-07-16

申请号：US16463428

申请日：2017-11-02

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Toshiyuki INADA ,  Takashi FUNAKOSHI ,  Hidenobu SATO ,  Tomoko YUHARA

IPC: F16K7/14 ,  F16K31/122 ,  F16K31/02 ,  H01L21/205

Abstract: A valve device includes a valve body that defines flow paths, a diaphragm provided so as to be capable of opening and closing the flow paths, an operation member provided so as to be capable of moving in opening and closing directions that open and close the flow paths by operating the diaphragm, a main actuator that applies a driving force corresponding to an operating pressure applied in the opening direction or the closing direction of the opening and closing directions with respect to the operation member, a switching mechanism capable of selectively switching a position of the operation member that regulates a degree of opening of the flow paths between a first open position and a second open position in accordance with a magnitude of the operating pressure, and regulating mechanisms capable of independently regulating the first open position and the second open position.

公开(公告)号：US20240151319A1

公开(公告)日：2024-05-09

申请号：US18526626

申请日：2023-12-01

Applicant: FUJIKIN INCORPORATED

Inventor： Masahiko TAKIMOTO ,  Toshihide YOSHIDA ,  Tsutomu SHINOHARA ,  Kouji NISHINO

IPC: F16K31/02 ,  G05D7/06

CPC classification number: F16K31/02 ,  G05D7/0623 ,  G05D7/0635 ,  G05D7/0652 ,  H01L21/67017

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

公开(公告)号：US20210125840A1

公开(公告)日：2021-04-29

申请号：US16634681

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Yukio MINAMI ,  Tsutomu SHINOHARA

IPC: H01L21/67 ,  H01L21/02

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.

公开(公告)号：US20160047483A1

公开(公告)日：2016-02-18

申请号：US14780393

申请日：2014-03-17

Applicant: FUJIKIN INCORPORATED

Inventor： Takashi HIROSE ,  Michio YAMAJI ,  Toshihide YOSHIDA ,  Kohei SHIGYOU

IPC: F16K31/00 ,  F16K7/14 ,  F16K25/00 ,  F16K27/02

CPC classification number: F16K31/004 ,  F16K7/14 ,  F16K25/005 ,  F16K27/0236 ,  F16K31/007

Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.

Abstract translation: 用于流量控制器的流量控制阀包括：阀主体，其设置有开口阀室孔，金属隔膜阀元件，具有相互相对的凹口的下支撑筒，安装在下支撑筒上的上支撑筒， 水平地设置在下支撑筒的槽口处的支撑框架，放置在支撑框架和下支撑筒的底部之间的盘簧，设置在支撑框架上的下支架，插入到支撑筒上方的压电元件 下支架，与支撑框架一起固定到阀主体的引导件，其中支撑筒以可垂直移动的方式插入通过引导筒。 通过压电元件的延伸将支撑筒向上压，由此金属隔膜阀元件通过弹性力与阀座分离。

公开(公告)号：US20220196163A1

公开(公告)日：2022-06-23

申请号：US17425974

申请日：2020-01-17

Applicant: FUJIKIN INCORPORATED

Inventor： Daihi TSUCHIGUCHI ,  Toshihide YOSHIDA ,  Ryutaro TANNO ,  Yuya SUZUKI ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K7/16 ,  F16K31/122 ,  F16K37/00 ,  F16K31/00

Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

公开(公告)号：US20210125839A1

公开(公告)日：2021-04-29

申请号：US16634673

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Yukio MINAMI ,  Tsutomu SHINOHARA

IPC: H01L21/67 ,  H01L21/02

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies carbon dioxide in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied carbon dioxide stored in the tank toward the processing chamber, and a damper part that is provided to a flow path communicating with a discharge side of the pump and suppresses periodic pressure fluctuations of the liquid discharged from the pump. The damper part includes a spiral tube formed into a spiral shape that is fixed at both end portions in predetermined positions, and allows the liquid discharged from the pump to flow therethrough.

公开(公告)号：US20200370671A1

公开(公告)日：2020-11-26

申请号：US16763731

申请日：2018-11-12

Applicant: FUJIKIN INCORPORATED

Inventor： Masahiko TAKIMOTO ,  Toshihide YOSHIDA ,  Kenta KONDO ,  Ryousuke DOHI ,  Kouji NISHINO

IPC: F16K31/02 ,  F16K31/00

Abstract: A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

公开(公告)号：US20190285176A1

公开(公告)日：2019-09-19

申请号：US16347934

申请日：2017-11-02

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Toshiyuki INADA ,  Takashi FUNAKOSHI

IPC: F16J3/02 ,  F16K31/122 ,  F16K1/52

Abstract: A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.