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公开(公告)号:US10037860B2
公开(公告)日:2018-07-31
申请号:US15512518
申请日:2015-09-10
Applicant: FUJIKURA LTD.
Inventor: Daisuke Arai
Abstract: An ion filter used for an electron multiplier includes an insulating substrate; a first conductive layer formed on one main surface of the substrate; and a second conductive layer formed on another main surface of the substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the substrate. The one main surface of the substrate is disposed at a downstream side in a moving direction of electrons in a chamber of the electron multiplier and the other main surface of the substrate is disposed at an upstream side in the moving direction of electrons in the chamber of the electron multiplier. A first thickness of the first conductive layer formed on the one main surface of the substrate is thicker than a second thickness of the second conductive layer on the other main surface of the substrate.
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公开(公告)号:US20180358214A1
公开(公告)日:2018-12-13
申请号:US15781018
申请日:2016-12-02
Applicant: FUJIKURA LTD.
Inventor: Daisuke Arai
IPC: H01J47/00
Abstract: An ion filter is used for a gas detector including a gas electron multiplier. The ion filter includes: an insulating substrate; a first patterned conductive layer on one main surface of the insulating substrate; and a second patterned conductive layer on another main surface of the insulating substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the insulating substrate on which the first patterned conductive layer and the second patterned conductive layer are formed. The one main surface of the insulating substrate is disposed on an upstream side in a movement direction of electrons in the gas detector. The other main surface of the insulating substrate is disposed on a downstream side in the movement direction of the electrons in the gas detector. The first patterned conductive layer has a line width thicker than a line width of the second patterned conductive layer.
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公开(公告)号:US20170256378A1
公开(公告)日:2017-09-07
申请号:US15512518
申请日:2015-09-10
Applicant: FUJIKURA LTD.
Inventor: Daisuke Arai
Abstract: An ion filter used for an electron multiplier includes an insulating substrate; a first conductive layer formed on one main surface of the substrate; and a second conductive layer formed on another main surface of the substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the substrate. The one main surface of the substrate is disposed at a downstream side in a moving direction of electrons in a chamber of the electron multiplier and the other main surface of the substrate is disposed at an upstream side in the moving direction of electrons in the chamber of the electron multiplier. A first thickness of the first conductive layer formed on the one main surface of the substrate is thicker than a second thickness of the second conductive layer on the other main surface of the substrate.
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公开(公告)号:US10453661B2
公开(公告)日:2019-10-22
申请号:US15781018
申请日:2016-12-02
Applicant: FUJIKURA LTD.
Inventor: Daisuke Arai
Abstract: An ion filter is used for a gas detector including a gas electron multiplier. The ion filter includes: an insulating substrate; a first patterned conductive layer on one main surface of the insulating substrate; and a second patterned conductive layer on another main surface of the insulating substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the insulating substrate on which the first patterned conductive layer and the second patterned conductive layer are formed. The one main surface of the insulating substrate is disposed on an upstream side in a movement direction of electrons in the gas detector. The other main surface of the insulating substrate is disposed on a downstream side in the movement direction of the electrons in the gas detector. The first patterned conductive layer has a line width thicker than a line width of the second patterned conductive layer.
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