公开(公告)号：US20240199915A1

公开(公告)日：2024-06-20

申请号：US18275266

申请日：2022-02-02

Applicant: FUJIMI INCORPORATION

Inventor： Yuichiro Nakagai ,  Yasuaki ITO ,  Hiroyuki ODA ,  Shogaku IDE ,  Shinichiro TAKAMI

IPC: C09G1/02 ,  B24B37/04 ,  H01L21/02

CPC classification number: C09G1/02 ,  B24B37/044 ,  H01L21/02013

Abstract: Provided is a polishing composition containing an abrasive, permanganate, an aluminum salt, and water. In the polishing composition, a relation of a content W1 [% by weight] of the abrasive, a concentration C1 [mM] of the permanganate, and a concentration C2 [mM] of the aluminum salt satisfies at least one condition of the following conditions [A], [B], and [C]:


satisfying both of 500≤(C1/W1) and 0.04≤(C2/C1);  [A]



satisfying both of 200≤(C1/√(W1)) and 8≤C2; and  [B]



satisfying both of 500≤(C1/W1) and 8≤C2.  [C]