Deflectable micro-mirror
    10.
    发明授权
    Deflectable micro-mirror 有权
    振荡微镜

    公开(公告)号:US06449079B1

    公开(公告)日:2002-09-10

    申请号:US09622387

    申请日:2000-11-20

    申请人: Falk Herrmann

    发明人: Falk Herrmann

    IPC分类号: G02B2608

    CPC分类号: G02B26/0841 G02B26/0858

    摘要: An oscillatory micromirror having a cantilevered mirror surface is joined using at least one torsion axis formed by at least one torsion beam mounted on the mirror surface, to a support member that surrounds at least portions of the mirror surface. There is located between at least one of the torsion beams and the support member a flexural beam that performs a flexural oscillation which induces a torsional oscillation of the mirror surface about the torsion axis. At a suitable frequency, large amplitudes of the torsional oscillation may be provided by small amplitudes of the flexural oscillation.

    摘要翻译: 具有悬臂镜表面的振荡微镜使用由安装在镜面上的至少一个扭力梁形成的至少一个扭转轴连接到围绕镜表面的至少一部分的支撑构件。 位于至少一个扭转梁和支撑构件之间的弯曲梁,其执行弯曲振荡,其引起镜面围绕扭转轴线的扭转振荡。 在合适的频率下,可以通过弯曲振荡的小振幅来提供大幅度的扭转振荡。