摘要:
A method for evaluating reliance level of a virtual metrology system is disclosed. In this method, a reliance index (RI) and a RI threshold value are calculated by analyzing the process data of production equipment, thereby determining if the virtual metrology result is reliable. Besides, in this method, a global similarity index (GSI) and individual similarity indexes (ISI) are also provided for defining the degree of similarity between the current set of process data and all of the sets of historical process data used for establishing the conjecture model, thereby assisting the RI in gauging the degree of reliance and locating the key parameter(s) that cause major deviation.
摘要:
A method for evaluating reliance level of a virtual metrology system is disclosed. In this method, a reliance index (RI) and a RI threshold value are calculated by analyzing the process data of production equipment, thereby determining if the virtual metrology result is reliable. Besides, in this method, a global similarity index (GSI) and individual similarity indexes (ISI) are also provided for defining the degree of similarity between the current set of process data and all of the sets of historical process data used for establishing the conjecture model, thereby assisting the RI in gauging the degree of reliance and locating the key parameter(s) that cause major deviation.
摘要:
A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed, wherein the current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool are utilized to predict the future product quality, and a conjecture modeling step and prediction modeling step are performed respectively. The conjecture modeling step itself also can be applied for the purpose of virtual metrology. Further, a self-searching step and a self-adjusting step are performed for searching the best combination of various parameters/functions used by the conjecture algorithm or prediction algorithm; and meeting the requirements of new equipment parameters and conjecture/prediction accuracy.
摘要:
A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed. The present invention utilizes the current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool to predict the future product quality. The quality prognostics system is composed of conjecture modeling means and prediction modeling means. The conjecture modeling means itself also can be applied for the purpose of virtual metrology. Further, the quality prognostics method possesses a self-searching means and a self-adjusting means for searching the best combination of various parameters/functions used by the conjecture algorithm or prediction algorithm; and meeting the requirements of new equipment parameters and conjecture/prediction accuracy.
摘要:
Antenna, antenna combination, and portable electronic device having the antenna or the antenna combination are disclosed. The antenna comprises a radiator, a grounding portion, and an arc-shaped feeding portion connected with a coaxial cable for feeding electronically. A first end of the arc-shaped feeding portion is connected with the radiator, and a second end of the arc-shaped feeding portion is connected with the grounding portion.
摘要:
A flat antenna is used for a cable inputting a signal. The flat antenna comprises a base board, a radiator element, a filter unit, and a ground element wherein the radiator element, the filter unit, and the ground element are disposed on the board. The filter unit is used for eliminating or keeping the specific range of the frequency.
摘要:
An antenna structure includes a radiation element, a grounding element, a feeding point, and a connection element. The radiation element includes a first radiator and a second radiator. The second radiator includes a first end close to a first end of the first radiator. The grounding element is coupled to the first end of the second radiator. The feeding point is coupled to the first end of the first radiator and is close to the first end of the second radiator. The connection element is coupled between the feeding point and the grounding element. The radiation element, the grounding element, the feeding point, and the connection element are constructed by metal wire.
摘要:
An antenna structure includes a radiation element, a grounding element, a feeding point, and a connection element. The radiation element includes a first radiator and a second radiator. The second radiator includes a first end close to a first end of the first radiator. The grounding element is coupled to the first end of the second radiator. The feeding point is coupled to the first end of the first radiator and is close to the first end of the second radiator. The connection element is coupled between the feeding point and the grounding element. The radiation element, the grounding element, the feeding point, and the connection element are constructed by metal wire.
摘要:
A portable electronic device with function of receiving and radiating radio frequency (RF) signal and a multi-frequency antenna thereof are disclosed. The portable electronic device comprises a RF module and a multi-frequency antenna connecting to the RF module. The multi-frequency antenna comprises a helix element and a coaxial cable disposed within the helix element. The helix element comprises a first helix portion and a second helix portion adjacent to each other, and the coaxial cable comprises a grounding portion and a radiating portion. The first helix portion covers the grounding portion, and the radiating portion is disposed within the second helix portion separated with each other.
摘要:
A portable electronic device with function of receiving and radiating radio frequency (RF) signal and a multi-frequency antenna thereof are disclosed. The portable electronic device comprises a RF module and a multi-frequency antenna connecting to the RF module. The multi-frequency antenna comprises a helix element and a coaxial cable disposed within the helix element. The helix element comprises a first helix portion and a second helix portion adjacent to each other, and the coaxial cable comprises a grounding portion and a radiating portion. The first helix portion covers the grounding portion, and the radiating portion is disposed within the second helix portion separated with each other.